The modern vacuum systems have valves and other elements PC or PLC controlled. For safety reasons all movements are checked in real time and adapted to real values of pressure temperature, current, thickness of sputtering layer, etching time etc. Motion, pressure and other sensors are essential. In data analyzing and motion control microprocessor plays important role. This article describes development of automated module for controlling the Lab High Vacuum System.

Rights

URN

URN:NBN:SI:DOC-521WHUUQ

COBISS ID

66986

Added

22.07.2011

Metadata

Citation

APA:

Berič, Boris, Drab, Marjan, Pregelj, Andrej, Sulčič, Slavko (1997). Avtomatizacija postopka naprševanja na laboratorijskem visokovakuumskem sistemu, volume 31, issue 3/4. URN:NBN:SI:DOC-521WHUUQ from http://www.dlib.si

MLA:

Berič, Boris, Drab, Marjan, Pregelj, Andrej, Sulčič, Slavko. Avtomatizacija postopka naprševanja na laboratorijskem visokovakuumskem sistemu. Inštitut za kovinske materiale in tehnologije
Železarna Jesenice
Železarna Ravne
Železarna Štore, 1997.
<http://www.dlib.si/?URN=URN:NBN:SI:DOC-521WHUUQ>

Kovine zlitine tehnologije
1992-1999
(Assembly record)

prejšnja

Kinetika notranje oksidacije v hitro strjenih zlitinah Cu-Zr
1997
(Previous issue)

Avtomatizacija postopka naprševanja na laboratorijskem visokovakuumskem sistemuAutomation of the sputtering process on high vacuum lab system

Avtomatizacija postopka naprševanja na laboratorijskem visokovakuumskem sistemu
Automation of the sputtering process on high vacuum lab system