Effect of deposition time on nanocolumnar TiZrN films grown by reactive magnetron co-sputtering with the OAD technique - Phae-ngam, Wuttichai (Materiali in tehnologije, 2021)
Keywords: OAD; reactive co-sputtering; reaktivno istočasno naprševanje; self-annealing effect; TiZrN film; učinek samo-popuščanja (samo-mehčanja)