J. WANG et al.: EFFECT OF AN ELECTROMAGNETIC FIELD ON THE MICROSTRUCTURE AND PROPERTIES ...
833–838
EFFECT OF AN ELECTROMAGNETIC FIELD ON THE
MICROSTRUCTURE AND PROPERTIES OF Cr(Ti)AlN HARD
COATINGS PREPARED WITH ARC-ION PLATING
VPLIV ELEKTROMAGNETNIH POLJ NA MIKROSTRUKTURO IN
LASTNOSTI TRDIH PREVLEK NA OSNOVI Cr(Ti)AlN,
PRIPRAVLJENIH S PLATIRANJEM V IONSKEM OBLOKU
Jin Wang
1*
, Dayan Ma
2
,QiLiu
2
, Yetang Jin
1
,XuW ang
1
1
School of Mechanical Engineering, Qingdao University of Technology, Qingdao 266520, China
2
State Key Laboratory for Mechanical Behavior of Materials, Xi’an Jiaotong University, Xi’an 710049, China
Prejem rokopisa – received: 2019-04-03; sprejem za objavo – accepted for publication: 2019-06-27
doi:10.17222/mit.2019.072
A series of CrAlN and TiAlN hard coatings were prepared using industrial arc-ion plating with or without the embedded axial
electromagnetic filtration technology. The microstructure evolution and mechanical properties of the hard coatings were
compared after annealing. The results show that the grain size of the hard coatings prepared with an arc induced by an
electromagnetic field decreases significantly, and the quantity of pits and hard particles reduces, leading to an improvement of
compactness. Furthermore, the wear resistance and the thermal stability of the coatings prepared with electromagnetic fields
improve significantly.
Keywords: arc-ion plating, axial electromagnetic field, microstructure evolution, mechanical property, wear resistance
Avtorji so pripravili vrsto CrAlN in TiAlN trdih prevlek na industrijski napravi za ionsko oblo~no platiranje, brez ali v
prisotnosti osne elektromagnetne filtracijske tehnologije. Nato so med seboj primerjali razvoj mikrostruktur in mehanske
lastnosti izdelanih trdih prevlek po njihovem naknadnem `arjenju. Rezultati raziskave so pokazali, da se je velikost kristalnih
zrn trdih prevlek, izdelanih v prisotnosti elektromagnetnih polj, pomembno zmanj{ala. Zmanj{ala se je tudi koli~ina jamic in
trdih delcev, kar je izbolj{alo kompaktnost trdih prevlek. Poleg tega se je znatno izbolj{ala tudi odpornost proti obrabi in
termi~na stabilnost prevlek, izdelanih v elektromagnetnih poljih.
Klju~ne besede: platiranje v obloku ionov, osno elektromagnetno polje, razvoj mikrostrukture, mehanske lastnosti, odpornost
proti obrabi
1 INTRODUCTION
Arc-ion plating is a deposition process with a high
ion energy and high speed, suitable for many kinds of
materials, and a simple cleaning process before prepa-
ration.
1–4
The deposition technology is widely used in the
industrial surface engineering of hot-working dies.
However, it is known that the inevitable appearance of
hard particulates in the process of preparation have
negative influences on the application effectiveness of
the coating dies.
Recently, the arched electromagnetic field was
developed in order to reduce the size and number of hard
particles in coatings. TiN coatings have been deposited
by adding an arched electromagnetic field on the cathode
arc source, and the mechanical properties of the coatings
have been greatly improved.
5,6
However, the ion-deposi-
tion rate of the arched electromagnetic field is too slow
to be applied in industry. In order to handle the problem
of the low deposition rate, the axial electromagnetic field
was developed. The extra-axial magnetic field can make
the arc spot move at a high speed, steadily and regularly
within circular and radial shrinkage.
7,8
As the tempera-
ture of the target surface decreases, restricting the growth
of grains, the grain size decreases. Simultaneously, the
size of hard particulates decreases, resulting in an im-
provement of the compactness of the coatings. Q.
Zhang
9,10
prepared AlTiN coatings using a cathode arc-
source device with an axial magnetic field. The hardness
of the coatings increased significantly.
At present, the design and analysis of electromag-
netic fields are receiving a lot of attention. However,
there is still little research on the effect of electromag-
netic fields on the comprehensive properties of coatings.
In this study, a series of ternary coatings were synthe-
sized using traditional arc-ion plating with an axial
electromagnetic field. The corresponding mechanical,
tribological and high-temperature oxidation-resistance
properties were characterized.
Materiali in tehnologije / Materials and technology 53 (2019) 6, 833–838 833
UDK 620.1:537.8:621.793.8:621.3.014.31 ISSN 1580-2949
Original scientific article/Izvirni znanstveni ~lanek MTAEC9, 53(6)833(2019)
*Corresponding author's e-mail:
wangjin@qut.edu.cn (Jin Wang)

2 EXPERIMENTAL PART
2.1 Preparation of ternary composite coatings
The coatings were deposited on samples of H13 steel
using the industrial technology of arc ion plating with a
magnetic filter ring for generating an axial electro-
magnetic field, as shown in Figure 1. The samples were
polished on a metallographic grinding machine, and then
placed in an anhydrous ethanol solution for ultrasonic
cleaning for 20 min. After the cleaning, the samples
were placed into a vacuum chamber with a background
pressure of 3×10
–4
Pa for the deposition of coatings. The
deposition process was followed by glowing, Cr bom-
bardment, deposition of the bottom layer and deposition
of the functional layer. Specific parameters of each step
are shown in Table 1. A 99.9 % pure Cr target, a
Cr
0.33
Al
0.67
target and four Ti
0.33
Al
0.67
targets, which were
circular thin targets with a diameter of 100 mm and a
thickness of 15 mm, were employed. To distinguish
whether the electromagnetic fields were used in the
preparation of hard coatings, formulas CrAlN(EM) and
TiAlN(EM) were used to indicate that they were
prepared with electromagnetic fields while CrAlN and
TiAlN indicate that they were prepared without
electromagnetic fields.
2.2 Test methods
The deposited samples were annealed at 700 °C in a
programmable protective-atmosphere box furnace for
30 min. The thickness and hardness of the coatings were
measured with a ball marker (JS-QHY-2) and a
micro-Vickers hardness tester (HXD-1000TM / LCD).
The anti-crack critical load Lc1 and failure load Lc2 of
the coatings were measured with a scratch tester
(WS-2005) for the quantitative adhesion analysis. The
friction coefficients on the surfaces of the coatings were
measured with a UMT multi-purpose friction-and-wear
testing machine to analyze the wear resistance. The
surface morphologies and microstructures of the coatings
were analyzed with a scanning electron microscope
(SEM) (ZEISS MERLIN COMPACT) and Nordlys Max
EDS. The phase structures of the coatings were analyzed
with X-ray diffraction (XRD) (Rigaku D/max-2550/PC).
The grain sizes of the coatings were calculated with the
Scherrer formula.
3 RESULTS AND DISCUSSION
3.1 Microstructure of coatings
The XRD pattern of each coating after annealing in
air is shown in Figure 2. The main structure of each
coating is a NaCl-type face-centered-cubic structure
(FCC). The CrAlN and CrAlN(EM) coatings mainly
consist of the fcc-Cr(Al)N phase with preferred (200)
orientation. The TiAlN and TiAlN (EM) coatings mainly
consist of the fcc-Ti(Al)N phase, also showing a pre-
ferred orientation of the crystal plane (200). In addition,
J. WANG et al.: EFFECT OF AN ELECTROMAGNETIC FIELD ON THE MICROSTRUCTURE AND PROPERTIES ...
834 Materiali in tehnologije / Materials and technology 53 (2019) 6, 833–838
Table 1: Processes and parameters for the four kinds of coatings
Pressure
(Pa)
Tempera-
ture (°C)
Time
(min)
Bias
(V)
Target current (A) Gas (sccm) Electromagnetic
voltage (V) Cr CrAl TiAl N
2
Ar
Glowing 0.3 450 40 800 ––––2 0–
Cr bombardment 0.3 450 30 200 110 – – – 20 –
CrN 1.5 450 15 110 110 – – 240 15 –
1-CrAlN 3.0 450 – 70 – 70 – 350 0 –
2-TiAlN 3.0 450 – 70 – – 70 350 0 –
3-CrAlN(EM) 3.0 450 – 70 – 70 – 350 0 15
4-TiAlN(EM) 3.0 450 – 70 – – 70 350 0 15
Figure 1: Schematic diagram of the electromagnetic arc source
Figure 2: XRD patterns for the coatings annealed in air

the metastable h-AlN phase appears in all the coatings.
The h-AlN diffraction-peak intensity of the CrAlN and
TiAlN coatings increases gradually, but the (111) and
(200) plane diffraction-peak intensity of the CrN and
TiN phase decreases compared with that of the
CrAlN(EM) and TiAlN(EM) coatings. This suggests that
the nucleation energy of h-AlN was reduced and the
growth of the (111) and (200) planes was promoted by
the addition of the axial electromagnetic field. It was
shown that when the amount of Al is high (50–77 %) and
the temperature is high, the energy required for the Al
atoms to be embedded in the lattice is higher than that
for the H-AlN nucleation, and the H-AlN phase is easily
formed.
11–13
In this study, the EDS analysis of various
coatings indicates that the Al amount is above 50 %,
which is in agreement with the results of the reference
studies (Figure 3).
The grain size was calculated with the Scherrer
formula. The grain sizes of the CrAlN (EM) and TiAlN
(EM) coatings are 14.8 nm and 15.2 nm, respectively. In
comparison, the grain sizes of the CrAlN and TiAlN
coatings are 16.8 nm and 17.9 nm, respectively. The
results imply that the grain size can be refined with an
axial electromagnetic field. When the electromagnetic
voltage increases within a certain range, the arc-spot
movement accelerates, the target ionization rate in-
creases, the density and energy of plasma improve
relatively. The ion-bombardment energy increases with
the acceleration of the substrate bias voltage, which leads
to more defects on the coating surface,
14
resulting in an
increase of the preferential nucleation sites and a de-
crease of the grain size.
The oxidation resistance of various coatings was also
analyzed with XRD as shown in Figure 2. The diffrac-
tion peaks of Al
2
O
3
and Cr
2
O
3
mainly appear for the
CrAlN and CrAlN(EM) coatings. The diffraction peaks
of Al
2
O
3
and TiO
2
are mainly in the TiAlN and
TiAlN(EM) coatings. In contrast, the order of oxidation
diffraction peaks from high to low is as follows: TiAlN,
CrAlN, TiAlN(EM) and CrAlN(EM). This is due to the
mixed oxides of Al
2
O
3
and Cr
2
O
3
, which are formed on
the surfaces of the coatings, and are more compact than
the structures of the CrAlN and CrAlN(EM) coatings.
They can be an effective barrier to the oxygen diffusion
into the interior at a high temperature, increasing the
oxidation resistance of the coatings.
15,16
However, the
mixed oxides in the TiAlN and TiAlN (EM) coatings are
Al
2
O
3
and TiO
2
.TiO
2
is a columnar structure with voids
around it, resulting in a decrease in the oxidation resist-
ance of the coatings.
17
As shown in Figure 4, the surface morphology of the
coatings was analyzed with SEM, and it was found that
there are more pits and hard particles on the surfaces of
the CrAlN and TiAlN coatings than on the surfaces of
the CrAlN(EM) and TiAlN(EM) coatings (Figures 4a to
4ff). After the annealing at 700 °C, the oxidation around
the pits and hard particulates on the surfaces of the
CrAlN and TiAlN coatings, and the size and number of
hard particulates increase (Figure 4c and 4g). However,
the surface morphology of the CrAlN(EM) and
TiAlN(EM) coatings shows no change after high-tem-
J. WANG et al.: EFFECT OF AN ELECTROMAGNETIC FIELD ON THE MICROSTRUCTURE AND PROPERTIES ...
Materiali in tehnologije / Materials and technology 53 (2019) 6, 833–838 835
Figure 4: SEM images of TiAlN and CrAlN coatings before and after
annealing
Figure 3: Element amounts in the four coatings before and after the
annealing

perature annealing (Figure 4d, 4h). Furthermore, the
EDS analysis of the O element (Figure 3) shows that the
atomic percentage of O in the CrAlN, TiAlN,
CrAlN(EM) and CrAlN(EM) coatings is 17.56, 17.56,
6.49 and 6.78 %, respectively. The results are in agree-
ment with those of the surface morphology and XRD.
The results also show that CrAlN(EM) and CrAlN(EM)
have better oxidation resistance than CrAlN and TiAlN.
Figure 5 shows the SEM cross-sectional morphology
of the coating elements after the annealing. It is observed
that the internal structure of the coatings is an equiaxed
nanocrystalline rather than the traditional columnar
structure. The reason is that the columnar epitaxial
growth of the grains was limited by adjusting the bias
voltage, electromagnetic coil voltage, target current and
vacuum in the process of the coating preparation.
18,19
Furthermore, no obvious oxide layers are observed in the
cross-sectional morphologies of the coatings, indicating
that the oxidation reaction occurred only in the local
regions of the coating surfaces, and the coatings did not
fail completely.
3.2 Tribological properties
The wear-scar morphologies and the average friction
coefficients of the coatings before and after the anneal-
ing are shown in Figures 6 and 7. Before the annealing,
the friction coefficients of the CrAlN and TiAlN coatings
are relatively high, and there are many pits in the wear
scar; the wear mechanism is mainly adhesive wear.
However, the number and size of the pits on the surfaces
of the wear scars of the CrAlN(EM) and TiAlN(EM)
coatings significantly decrease and the friction coeffi-
cients decrease. After the annealing, although the friction
coefficients of the CrAlN and TiAlN coatings decrease
greatly, they are still higher than those of the CrAlN
(EM) and TiAlN (EM) coatings. This can be explained
with the fact that the internal structures of the CrAlN and
TiAlN coatings are not compact, resulting in the Al
element contacts with the O element to form Al
2
O
3
with
self-lubricating in the process of annealing, which plays
a role of solid lubrication. When in contact with O, the
Cr element can form Cr
2
O
3
with high hardness and heat
resistance, which is beneficial to chip removal.
20,21
The
columnar amorphous TiO
2
formed due to the contact of
J. WANG et al.: EFFECT OF AN ELECTROMAGNETIC FIELD ON THE MICROSTRUCTURE AND PROPERTIES ...
836 Materiali in tehnologije / Materials and technology 53 (2019) 6, 833–838
Figure 6: Wear morphologies of coatings before and after annealing
Figure 5: Cross-sectional SEM images of different coatings annealed
in air at 700 °C for 30 min
Figure 7: Average friction coefficients of coatings before and after
annealing

Ti with O not only has a poor chip-removal ability, but
also has voids, leading to continuous oxidation.
22
It is
worth noting that the wear mechanism of the CrAlN
(EM) coating changes from the adhesive wear to the
abrasive wear, not only due to the formation of Al
2
O
3
,
but also due to the changes in the parameters of the
electromagnetic filter device.
3.3 Mechanical properties
After the testing, the thickness of the CrAlN,
CrAlN(EM) and TiAlN, TiAlN(EM) are (5.32, 5.29, 5.08
and 5.21) μm. Figure 8 shows the hardness of the
coatings before and after the annealing. The microhard-
ness levels of the CrAlN(EM) and TiAlN(EM) coatings
are higher than those of the CrAlN and TiAlN, respect-
ively. The improvement of the coating hardness is mainly
caused by the Hall-Petch effect merged with the Al solid
solution in CrN or TiN, resulting in solid-solution
strengthening, fine-grain strengthening and an abundant
formation of the ceramic phase with an increase in the N
amount.
23,24
In this study, the amounts of Al and N are
almost the same according to the EDS analysis, indi-
cating that the improved hardness of the CrAlN(EM) and
TiAlN(EM) coatings is due to fine-grain strengthening.
The axial magnetic field increases the energy of the
deposited ions and enhances the nucleation rate of the
grains, resulting in grain refinement. After the annealing,
the hardness of the CrAlN(EM) and TiAlN(EM) coatings
still remains stable, while the hardness of the CrAlN and
TiAlN coatings decreases. This suggests that the addition
of the axial electromagnetic field reduces the soft
hcp-AlN phase and residual stress of the CrAlN(EM)
and TiAlN(EM) coatings.
The adhesive force of each coating was quantitatively
analyzed with the scratch method. The critical load of
the crack resistance (Lc1) and the failure critical load
(Lc2) before and after the annealing are shown in Fig-
ure 9. Critical loads Lc1 and Lc2 of the CrAlN(EM) and
TiAlN(EM) coatings with a small grain size, compact
structure, and low compressive stress are significantly
higher than those of the CrAlN and TiAlN coatings. Lc1
and Lc2 are mainly determined with the residual stress
of the coatings, which can cause the coatings to be
exfoliated by separating the coating from the substrate
and subsequent wrinkling. High-temperature annealing
can increase the residual stress of the coatings. There-
fore, Lc1 and Lc2 of the CrAlN and TiAlN coatings de-
crease significantly after annealing. The electromagnetic
field increases the compactness of the coatings and
reduces the residual stress. Therefore, after annealing,
Lc1 and Lc2 of CrAlN(EM) and TiAlN(EM) are
significantly higher than those of CrAlN and TiAlN, and
the stability of the binding force of CrAlN(EM) and
TiAlN(EM) is better.
4 CONCLUSIONS
A series of CrAlN and TiAlN coatings were prepared
using arc-ion plating with and without an axial
electromagnetic field. The effects of the axial magnetic
field on the microstructure and mechanical properties of
the two coatings were compared. The main conclusions
are as follows:
1) Axial electromagnetic field can significantly refine
the grain size of the two coatings and improve their
oxidation resistance.
2) Axial electromagnetic field can significantly
reduce the pits and hard particles on the surfaces of the
two coatings, reducing the friction coefficient and
improving the wear resistance.
3) Axial electromagnetic field can increase the
hardness of the two coatings and improve the bond
between the coatings and the substrate.
4) After annealing, the mechanical properties of the
two coatings prepared with the axial electromagnetic
field can still be maintained.
J. WANG et al.: EFFECT OF AN ELECTROMAGNETIC FIELD ON THE MICROSTRUCTURE AND PROPERTIES ...
Materiali in tehnologije / Materials and technology 53 (2019) 6, 833–838 837
Figure 9: Critical load (Lc1, Lc2) of deposited and annealed coatings
Figure 8: Average microhardness values of deposited and annealed
coatings

Acknowledgment
This work was supported by the KeyR&Dprojects
of Shandong Province under Grant No.2019GGX102023
and the National Natural Science Foundation of China
under Grant Nos. 51205217 and 51775289.
5 REFERENCES
1
H. Lille, A. Ryabchikov, E. Adoberg, L. Kurissoo, P. Peetsalu, L.
Lind, Evaluation of residual stresses in PVD coatings by means of
the curvature method of plate, Key Eng. Mater., 721 (2016),
404–408, doi:10.4028/www.scientific.net/kem.721.404
2
J. Lawal, P. Kiryukhantsev-Korneev, A. Matthews, A. Leyland, Me-
chanical properties and abrasive wear behaviour of Al-based PVD
amorphous/nanostructured coatings, Surf. Coat. Technol., 310
(2017), 59–69, doi:10.1016/j.surfcoat.2016.12.031
3
C. Puneet, K. Valleti, A. V. Gopal, Influence of surface preparation
on the tool life of cathodic arc PVD coated twist drills, J. Manuf.
Process., 27 (2017), 233–240, doi:10.1016/j.jmapro.2017.05.011
4
M. Yousfi, J. C. Outeiro, C. Nouveau, B. Marcon, B. Zouhair, Tribo-
logical behavior of PVD hard coated cutting tools under cryogenic
cooling conditions, Procedia CIRP, 58 (2017), 561–565, doi:10.1016/
j.procir.2017.03.269
5
M. Amati, L. Gregoratti, H. Sezen, A. Grce, M. Milosavljevi}, K. P.
Homewood, Compositional and structural studies of ion-beam
modified AlN/TiN multilayers, Appl. Surf. Sci., 411 (2017),
431–436, doi:10.1016/j.apsusc.2017.03.160
6
X. W. Shi, X. G. Li, W. Q. Qiu, Z. Y. Liu, Hardening mechanism of
TiN coating by magnetic filtered arc ion plating, Chin. J. Vac. Sci.
Technol., 28 (2008), 486–491, doi:10.13922/j.cnki.cjovst.2008.
05.013
7
L. Chen, Z. L. Pei, J. Q. Xiao, J. Gong, C. Sun, TiAlN/Cu nano-
composite coatings deposited by filtered cathodic arc ion plating, J.
Mater. Sci. Technol., 33 (2016), 111–116, doi:10.1016/j.jmst.2016.
07.018
8
W. C. Lang, J. Q. Xiao, J. Gong, C. Sun, R. F. Huang, L. S. Wen,
Study on cathode spot motion and macroparticles reduction in
axisymmetric magnetic field-enhanced vacuum arc deposition,
Vacuum, 84 (2010), 1111–1117, doi:10.1016/j.vacuum.2010.01.037
9
Q. Zhang, C. Qiu, J. Liang, D. Geng, Q. Wang, Influence of electro-
magnetic field on properties of arc-ion plated AlTiN coatings, Chin.
J. Vac. Sci. Technol., 36 (2016), 666–671, doi:10.13922/j.cnki.cjovst.
2016.06.11
10
W. Lang, Y. Zhao, J. Xiao, J. Gong, C. Sun, B. Yu, L. Wen, Influence
of rotating transverse magnetic field on motion of cathode spot in arc
ion plating, Chin. J. Vac. Sci. Technol., 35 (2015), 316–322,
doi:10.13922/j.cnki.cjovst.2015.03.12
11
P. H. Mayrhofer, H. Willmann, A. E. Reiter, Structure and phase evo-
lution of Cr-Al-N coatings during annealing, Surf. Coat. Technol.,
202 (2008), 4935–4938, doi:10.1016/j.surfcoat.2008.04.075
12
Y. Chen, H. Du, M. Chen, J. Yang, J. Xiong, H. B. Zhao, Structure
and wear behavior of AlCrSiN-based coatings, Appl. Surf. Sci., 370
(2016), 176–183, doi:10.1016/j.apsusc.2015.12.027
13
W. L. Chen, J. Zheng, Y. Lin, S. Kwon, S. H. Zhang, Comparison of
AlCrN and AlCrTiSiN coatings deposited on the surface of plasma
nitrocarburized high carbon steels, Appl. Surf. Sci., 332 (2015),
525–532, doi:10.1016/j.apsusc.2015.01.212
14
I. I. Beilis, Vacuum arc cathode spot grouping and motion in mag-
netic fields, IEEE T. Plasma, 30 (2002), 2124–2132, doi:10.1109/tps.
2002.807330
15
C. Sabitzer, J. Paulitsch, S. Kolozsvári, R. Rachbauer, P. H. Mayr-
hofer, Impact of bias potential and layer arrangement on thermal
stability of arc evaporated Al-Cr-N coatings, Thin Solid Films, 610
(2016), 26–34, doi:10.1016/j.tsf.2016.05.011
16
Y. Q. Wei, X. B. Tian, C. Z. Gong, S. Q. Yang, Microstructure and
mechanical properties of TiN/TiAlN multilayer coatings deposited
by arc ion plating with separate targets, Chin. J. Mater. Res., 25
(2011), 630–636, doi:10.1016/s1003-6326(11)60823-6
17
Y. Xu, Q. Miao, W. P. Liang, L. Wang, X. S. Yu, B. L. Ren, Z. J. Yao,
A comparison of oxidation behavior of Al coatings prepared by mag-
netron sputtering and arc ion plating on y -TiAl, Rare Metal. Mat.
Eng., 43 (2014), 2652–2656, doi:0.1016/S1875-5372(15)60020-0
18
M. Zhang, G. Q. Lin, G. Y. Lu, C. Dong, K. H. Kim, High-tem-
perature oxidation resistant (Cr,Al)N films synthesized using pulsed
bias arc ion plating, Appl. Surf. Sci., 254 (2008), 7149–7154,
doi:10.1016/j.apsusc.2008.05.293.
19
H. Wu, X. H. Li, M. Y. Guo, S. You, Thermal stability of physical
vapor deposited (Ti,Al)N hard coating, Chin. J. Vac. Sci. Technol.,
36 (2016), 130–135, doi:10.13922/j.cnki.cjovst.2016.02.02
20
H. Willmann, P. H. Mayrhofer, P. O. Å. Persson, A. E. Reiter, L.
Hultman, C. Mitterer, Thermal stability of Al-Cr-N hard coatings,
Scripta Mater., 54 (2006), 1847–1851, doi:10.1016/j.scriptamat.
2006.02.023
21
J. Zhang, W. Tang, C. Mao, K. Tang, X. F. Yu, Phase structure stab-
ility and thermal decomposition mechanism of CrAlN hard cutting
tool coating, Chin. J. Nonferrous. Met., 26 (2016), 88–95,
doi:10.19476/j.ysxb.1004.0609.2016.01.011
22
C. Mastail, M. David, F. Nita, A. Michel, G. Abadias, Ti, Al and N
adatom adsorption and diffusion on rocksalt cubic AlN (001) and
(011) surfaces: Ab initio calculations, Appl. Surf. Sci., 423 (2017),
354–364, doi:10.1016/j.apsusc.2017.06.179
23
Z. W. Xie, L. P. Wang, X. F. Wang, L. Huang, Y. Lu, J. C. Yan,
Microstructure and tribological properties of diamond-like carbon
and TiAlSiCN nanocomposite coatings, Surf. Coat. Technol., 206
(2011), 1293–1298, doi:10.1016/j.surfcoat.2011.08.047
24
V. V. Uglov, V. M. Anishchik, S. V. Zlotski, G. Abadias, S. N. Dub,
Structural and mechanical stability upon annealing of arc-deposited
Ti-Zr-N coatings, Surf. Coat. Technol., 202 (2008), 2394–2398,
doi:10.1016/j.surfcoat.2007.09.035
J. WANG et al.: EFFECT OF AN ELECTROMAGNETIC FIELD ON THE MICROSTRUCTURE AND PROPERTIES ...
838 Materiali in tehnologije / Materials and technology 53 (2019) 6, 833–838