<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-Z7X1Y1SZ</identifier><date>1990</date><creator>Aleksandrov, Boris</creator><creator>Klanjšek Gunde, Marta</creator><relation>documents/doc/Z/URN_NBN_SI_doc-Z7X1Y1SZ_001.pdf</relation><relation>documents/doc/Z/URN_NBN_SI_doc-Z7X1Y1SZ_001.txt</relation><format format_type="volume">20</format><format format_type="extent">20, št. 4 (december 1990), str. 201-204</format><format format_type="issue">4</format><format format_type="type">article</format><identifier identifier_type="ISSN">0352-9045</identifier><identifier identifier_type="COBISSID">51033088</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-Z7X1Y1SZ</identifier><language>slv</language><publisher>Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</publisher><source>Informacije MIDEM</source><rights>InC</rights><subject language_type_id="slv">silicijevi oksidi</subject><subject language_type_id="slv">spektralna analiza</subject><subject language_type_id="slv">tanke plasti</subject><title>Tankoplastni silicijevi oksidi</title></Record>