12 KB627 KB11 KB199219991997Irmančnik-Belič, LidijaPožun, KarolRemškar, Majaštevilka:1/2letnik:314 stranistr. 113-116COBISSID:12643111ISSN:1318-0010URN:URN:NBN:SI:doc-XZRLMU0QslInštitut za kovinske materiale in tehnologijeŽelezarna JeseniceŽelezarna RavneŽelezarna ŠtoreKovine zlitine tehnologijeelektronska mikroskopijakrommorfologijanikeljtanke plastiŠtudij Ni-Cr tankih plasti z elektronsko mikroskopijo| Study of Ni-Cr thin films by electron microscopy|A few nm-thick Ni-Cr layer forms the capacitance humidity sensor electrodes. The electrodes must have the adequate electric resistance, low mechanical tensions and proper elasticity coefficient in order to prevent the corruption of the Ni-Cr - dielectric layer joint when the dielectric is saturated by the water vapour. The upper electrode must be permeable for the water vapour in order to permit the water vapour to diffuse into the dielectric. The sufficient permeability of the Ni-Cr film is obtained by an evaporation under the incidence angle 75°. The deposition angle is defined as the angle between the normal of the substrate and the normal of the evaporating source. The obtained results of Ni-Cr layer analysis by the AES, AFM and TEM are presented. The thin Ni-Cr layer is nonhomogeneus due to the different vapour pressure of the Ni and Cr during the deposition process. The Ni-Cr thin film evaporated under 0° incidence angle is cracky, while the layer evaporated under 75° incidence angle has the columnar structurePri kapacitivnem senzorju vlage sta nekaj sto nanometrov debeli plasti No-Cr elektrodi kondenzatorja. Elektrodi morata biti električno prevodni, imeti morata majhne notranje napetosti in zadostno elastičnost, da pri nasičenju dielektrika z vodno paro ne pride do porušitve spoja Ni-Cr plasti in dielektrika. Zgornja elektroda mora biti prepustna za vodno paro. Prepustnost elektrode dosežemo z naparevanjem pod kotom. Kot naparjevanja je definiran kot kot med normalama podlage in uporove ladjice. V delu je podan študij plasti Ni-Cr z analizo TEM, AFM in AES. Tanka plast Ni-Cr je zaradi različnih parnih tlakov Ni in Cr med nanašanjem zelo nehomogena. Spreminja se sestava, prevodnost in morfologija. Plast, ki je naparjena pri kotu 0°, je razpokana, pri kotu 75° pa ima usmerjeno stebričasto strukturo, ki kompenzira napetostiTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of Slovenia