<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-V1OD4H43</identifier><date>2007</date><creator>Coym, Torsten</creator><creator>Hellebrand, Sybille</creator><creator>Ludwig, Stefan</creator><creator>Straube, Bernd</creator><creator>Wunderlich, Hans-Joachim</creator><creator>Zoellin, Christian G.</creator><relation>documents/doc/V/URN_NBN_SI_doc-V1OD4H43_001.pdf</relation><relation>documents/doc/V/URN_NBN_SI_doc-V1OD4H43_001.txt</relation><format format_type="volume">37</format><format format_type="issue">4</format><format format_type="type">article</format><format format_type="extent">str. 212-219</format><identifier identifier_type="ISSN">0352-9045</identifier><identifier identifier_type="COBISSID">6543188</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-V1OD4H43</identifier><language>eng</language><publisher>Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</publisher><source>Informacije MIDEM</source><rights>InC</rights><subject language_type_id="slv">kvaliteta</subject><subject language_type_id="slv">načrtovanje</subject><subject language_type_id="slv">nanoelektronski sistemi</subject><subject language_type_id="slv">preizkušanje</subject><title>Testing and monitoring nanoscale systems - challenges and strategies for advanced quality assurance</title></Record>