{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-TSY87GE2/5f3594c6-62a6-40a2-8f54-fdcff9d1a1b2/HTML","dcterms:extent":"20 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-TSY87GE2/f6058532-a2df-42d2-9d9f-a7f931c51daa/PDF","dcterms:extent":"2147 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-TSY87GE2/9876dea4-8e8b-41ef-bf2e-2262d0afc0bc/TEXT","dcterms:extent":"18 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-TSY87GE2","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"2001","dc:creator":["Kek-Merl, Darja","Panjan, Peter"],"dc:format":[{"@xml:lang":"sl","#text":"številka:2"},{"@xml:lang":"sl","#text":"letnik:21"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"str. 4-7"}],"dc:identifier":["ISSN:0351-9716","COBISSID:16109095","URN:URN:NBN:SI:doc-TSY87GE2"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"laserji"},{"@xml:lang":"sl","#text":"nanašanje"},{"@xml:lang":"sl","#text":"tanke plasti"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Nanašanje tankih plasti s pulznim laserjem| Pulsed laser deposition of thin films|"},"dc:description":[{"@xml:lang":"sl","#text":"High-power laser pulses can be used to vaporize s small area of the target. Generated cloud of the target material is then deposited onto the substrates. Laser radiation passing through the vapour cloud can also ionize a high percentage of the vapour. The most common laser type is the excimer laser with wavelength from 151-131 nm depending on the selected gas mixture (ArF-193nm, KrF-248nm, XeCl-308nm) or solid Nd:YAG lasers (266-1064nm). Lasers operate in pulses of energy between 0,1 to 1 J per pulse, duration timeis between 5 and 45 ns and commonly used repetition rates of 1 to 100 Hz. This techniques id ideal for the deposition of complex, multicomponent materials like high-temperature superconductors, ferroelectric and ferromagnetic materials"},{"@xml:lang":"sl","#text":"Visokoenergijski pulz laserske svetlobe lahko uporabimo za uparitev majhnega volumna na površini tarče. Oblak delcev materiala tarče,ki pri tem nastane, kondenzira na podlagah. Laserska svetloba hkrati do visoke stopnje ionizira pare materiala. Za ta namen je najprimernejši ekscimerski plinski (ArF-193nm, KrF-248 nm, XeCl-308 nm) ali trdni Nd-YAG laser (266-1064 nm). Laserji delujejo v pulzih, ki trajajo med 5 in 45 ns, frekvenca ponavljanja je med 1 in 100 Hz, energija enega pulza pa je približno 0,1-1 J. Ta tehnika nanašanja je idealna za nanos tankih plasti kompleksnih, večkomponentnih materialov, kot so visokotemperaturni superprevodniki, feroelektrične in feromagnetne snovi"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-TSY87GE2","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-TSY87GE2"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-TSY87GE2/f6058532-a2df-42d2-9d9f-a7f931c51daa/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-TSY87GE2/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-TSY87GE2"}}}}