URN:NBN:SI:doc-SJR9BZRF2025Ding, JianDing, YanFan, XingWang, JiayiYang, Yunchundocuments/doc/S/URN_NBN_SI_doc-SJR9BZRF_001.pdfdocuments/doc/S/URN_NBN_SI_doc-SJR9BZRF_001.txt355articlestr. 167-1720352-904510.33180/InfMIDEM2025.303281493251URN:NBN:SI:doc-SJR9BZRFengStrokovno društvo za mikroelektroniko, elektronske sestavne dele in materialeInformacije MIDEMBYbandpass filterinsertion lossmicro electromechanical system (MEMS)mikroelektromehanski sistem (MEMS)milimetrsko valovanjemillimeter wavepasovni filtervložna izgubaAn air-gapped cavity filter based on MEMS process for 5G millimeter wave applicationsZračni votlinski filter na MEMS osnovi za 5G aplikacije