{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-QO5KWNID/19fa816b-8c82-4f7e-a4f6-448799fc04ff/HTML","dcterms:extent":"16 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-QO5KWNID/69d0689f-a1a4-4450-a160-267592972ef5/PDF","dcterms:extent":"1840 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-QO5KWNID/b32de9dc-dfc7-4256-b7b2-cf8c63ef3518/TEXT","dcterms:extent":"14 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-QO5KWNID","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"2001","dc:creator":["Čekada, Miha","Panjan, Peter"],"dc:format":[{"@xml:lang":"sl","#text":"številka:1"},{"@xml:lang":"sl","#text":"letnik:21"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"str. 17-20"}],"dc:identifier":["ISSN:0351-9716","COBISSID:15965991","URN:URN:NBN:SI:doc-QO5KWNID"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"elektronska mikroskopija"},{"@xml:lang":"sl","#text":"ionsko jedkanje"},{"@xml:lang":"sl","#text":"priprava vzorcev"},{"@xml:lang":"sl","#text":"tanke plasti"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Priprava tankoplastnih vzorcev za presevno elektronsko mikroskopijo| Preparation of thin samples for transmission electron microscopy|"},"dc:description":[{"@xml:lang":"sl","#text":"The procedure for specimen preparation for thin film analysis by transmission electron is described. In the first part the mechanical procedure (thinning) is given for classical as well as cross-section transmission electron microscopy. In the second part insight on ionic etching is given including a physical background of the parameters choice"},{"@xml:lang":"sl","#text":"Opisan je postopek priprave vzorcev za analizo tankih plasti s presevnim elektronskim mikroskopom. V prvem delu je opisana mehanska priprava vzorca (tanjšanje) tako za klasično kot tudi za presecno presevno elektronsko mikroskopijo. V drugem delu govorimo o ionskem jedkanju vzorcev z razlago fizikalnega ozadja izbire parametrov"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-QO5KWNID","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-QO5KWNID"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-QO5KWNID/69d0689f-a1a4-4450-a160-267592972ef5/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-QO5KWNID/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-QO5KWNID"}}}}