<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-PLK8N4BW</identifier><date>2008</date><creator>Čekada, Miha</creator><creator>Kovač, Janez</creator><creator>Panjan, Matjaž</creator><creator>Panjan, Peter</creator><creator>Zalar, Anton</creator><relation>documents/znanstveni_clanki/vakuumist/html/URN_NBN_SI_doc-PLK8N4BW.html</relation><relation>documents/znanstveni_clanki/vakuumist/pdf/URN_NBN_SI_doc-PLK8N4BW.pdf</relation><relation>documents/znanstveni_clanki/vakuumist/txt/URN_NBN_SI_doc-PLK8N4BW.txt</relation><format format_type="issue">1/2</format><format format_type="volume">28</format><format format_type="main">6 strani</format><format format_type="type">article</format><format format_type="extent">str. 19-24</format><identifier identifier_type="ISSN">0351-9716</identifier><identifier identifier_type="COBISSID">22145319</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-PLK8N4BW</identifier><language>slv</language><publisher>Društvo za vakuumsko tehniko Slovenije</publisher><source>Vakuumist</source><rights>InC</rights><subject language_type_id="slv">difuzija</subject><subject language_type_id="slv">Hofmannov model</subject><subject language_type_id="slv">jedkanje</subject><subject language_type_id="slv">koncentracija</subject><subject language_type_id="slv">prenos snovi</subject><subject language_type_id="slv">tanke plasti</subject><title>Determination of concentration profiles and diffusion parameters in thin film structures using profile analysis and MRI model</title><title>Določanje koncentracijskih profilov in difuzijskih parametrov v tankoplastnih strukturah s profilno analizo in modelom MRI</title></Record>