{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-P2R63G6P/a592f86e-33b8-4f45-b020-3375f0b1a236/HTML","dcterms:extent":"18 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-P2R63G6P/0afa0091-70c4-4119-a248-077b4844ad6a/PDF","dcterms:extent":"1880 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-P2R63G6P/ce441b87-5b6c-44c5-bf2d-a311825f904b/TEXT","dcterms:extent":"15 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-P2R63G6P","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"2000","dc:creator":"Čekada, Miha","dc:format":[{"@xml:lang":"sl","#text":"številka:1"},{"@xml:lang":"sl","#text":"letnik:20"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"str. 16-19"}],"dc:identifier":["ISSN:0351-9716","COBISSID:15255335","URN:URN:NBN:SI:doc-P2R63G6P"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"debelina"},{"@xml:lang":"sl","#text":"materiali"},{"@xml:lang":"sl","#text":"meritve"},{"@xml:lang":"sl","#text":"preizkušanje"},{"@xml:lang":"sl","#text":"tanke plasti"},{"@rdf:resource":"http://www.wikidata.org/entity/Q214609"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Primerjava metod merjenja debeline tankih plasti|"},"dc:description":[{"@xml:lang":"sl","#text":"In this paper methods for thin film thickness measurement are briefly described. Foe each method the physical background and the measurement procedure is given as well as the thickness range, where the method is applicable. Also presented are the limitations of substrate and film type and the necessary equipment"},{"@xml:lang":"sl","#text":"V članku so kratko opisane metode, s katerimi merimo debelino tankih plasti. Pri vsaki je opisano fizikalno ozadje in način merjenja ter podan obseg debeline, na katerem je metoda uporabna. Predstavljene so tudi omejitve glede na vrsto plasti in podlage ter potrebna oprema"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-P2R63G6P","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-P2R63G6P"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-P2R63G6P/0afa0091-70c4-4119-a248-077b4844ad6a/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-P2R63G6P/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-P2R63G6P"}}}}