<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-P2R63G6P</identifier><date>2000</date><creator>Čekada, Miha</creator><relation>documents/znanstveni_clanki/vakuumist/html/urn_nbn_si_doc-p2r63g6p.html</relation><relation>documents/znanstveni_clanki/vakuumist/pdf/urn_nbn_si_doc-p2r63g6p.pdf</relation><relation>documents/znanstveni_clanki/vakuumist/txt/urn_nbn_si_doc-p2r63g6p.txt</relation><format format_type="issue">1</format><format format_type="volume">20</format><format format_type="main">4 strani</format><format format_type="type">article</format><format format_type="extent">str. 16-19</format><identifier identifier_type="ISSN">0351-9716</identifier><identifier identifier_type="COBISSID">15255335</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-P2R63G6P</identifier><language>slv</language><publisher>Društvo za vakuumsko tehniko Slovenije</publisher><source>Vakuumist</source><rights>InC</rights><subject language_type_id="slv">debelina</subject><subject language_type_id="slv">materiali</subject><subject language_type_id="slv">meritve</subject><subject language_type_id="slv">preizkušanje</subject><subject language_type_id="slv">tanke plasti</subject><title>Primerjava metod merjenja debeline tankih plasti</title></Record>