14 KB857 KB13 KB199219991999Budnar, MilošMozetič, MiranPelicon, PrimožPregelj, AndrejRunovc, FrancZorko, Benjaminletnik:334 straništevilka:5str. 357-360ISSN:1318-0010COBISSID:165546URN:URN:NBN:SI:doc-OVDFJVUUslInštitut za kovinske materiale in tehnologijeŽelezarna JeseniceŽelezarna RavneŽelezarna ŠtoreKovine zlitine tehnologijeERDAjedrske spektroskopske metodetitanvezavavodikŠtudij kovinskih materialov z metodo ERDA| ERDA studies of metals|Chemical composition of the surface layer of titanium cathode strips taken from a sputter ion pump was measured. The samples were cleaned by sand blasting with glass spheres and etching in a HF acid. Some samples were also heated in pure hydrogene atmosphere. Depth profiles of the elements heavier than He were measured by the RBS method, whereas for depth profiling of the hydrogen concentation in the cathode surface layers was performed by the ERDA method. It was found out that the samples contained about 10 at. % hydrogen. After heating of the samples in a hydrogene furnace, the hydrogene concentration decreased by almost half of the primary magnitudeAnalizirali smo kemijsko sestavo površin titanovih katodnih trakov, vzetih iz ionske naprševalne črpalke. Vzoci so bili očiščeni s peskanjem s steklenimi krogljicami in z jedkanjem v fluorovodikovi kislini, nekateri pa so bili ogrevani v vodikovi atmosferi. Za analizo smo uporabili metodo RBS, ki omogoča merjenje globinskih koncentracijskih profilov elementov, težjih od He,in metodo ERDA, s katero smo izmerili porazdelitev koncentracije vodika v vzorcih. Ugotovili smo, da je le-ta približno 10 at. %. Po segrevanju vzorcev v atmosferi vodika se je njegova koncentracija zmanjšalaTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije