{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-GLJOZ52R/d62cf2a3-f73f-4a84-8335-3bbfe33a5628/HTML","dcterms:extent":"35 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-GLJOZ52R/fae2aabf-0719-4157-a9f4-e228e643d3e6/PDF","dcterms:extent":"3868 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-GLJOZ52R/0280232a-25a7-44b6-a3bc-6c8b9a8862b9/TEXT","dcterms:extent":"32 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-GLJOZ52R","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"1998","dc:creator":"Kovač, Janez","dc:format":[{"@xml:lang":"sl","#text":"letnik:18"},{"@xml:lang":"sl","#text":"številka:2"},{"@xml:lang":"sl","#text":"8 strani"},{"@xml:lang":"sl","#text":"str. 4-11"}],"dc:identifier":["ISSN:0351-9716","COBISSID:13499687","URN:URN:NBN:SI:doc-GLJOZ52R"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"rentgenska fotoelektronska spektroskopija"},{"@xml:lang":"sl","#text":"rentgenske metode"},{"@xml:lang":"sl","#text":"spektroskopske metode"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Rentgenska fotoelektronska spektroskopija z visoko lateralno ločljivostjo - mikro XPS|"},"dc:description":[{"@xml:lang":"sl","#text":"The phenomena on the microscopic scale have been recognized to play an important role in the field of surface and interface engineering and thin film technologies. The lack of a suitable technique to characterize these phenomena forces the development of different approaches how to obtain high spatial resolution with XPS technique. Some of them are described in this article. In more details the new Scanning Photoemission Microscope (SPEM) installed in ESCA Microscopy beamline at synhroton Elettra is presented. Some typical results obtained by small spot XPS technique are given at the end"},{"@xml:lang":"sl","#text":"Na mnogih tehnoloških področjih, kjer stopajo v ospredje lastnosti površin, tankih plasti in faznih mej, se je pokazalo, da igrajo velikokrat pomembno vlogo procesi in pojavi na mikroskopskem nivoju. Potreba po karakterizaciji teh pojavov je narekovala razvoj lateralno visoke ločljive tehnike XPS. V prispevku so kratko podane osnovne značilnosti tehnike XPS, potrebna instumentalna oprema in različne izvedbe, ki omogočajo visoko lateralno ločljivost te tehnike. Nekoliko podrobneje je opisan rasterski fotoemisijski mikroskop na žarkovni liniji ESCA Microscopy na sinhrotronu Elettra. Podano je nekaj rezultatov, dobljenih s tehniko mikro XPS"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-GLJOZ52R","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-GLJOZ52R"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-GLJOZ52R/fae2aabf-0719-4157-a9f4-e228e643d3e6/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-GLJOZ52R/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-GLJOZ52R"}}}}