{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-DR35NX24/8ac357cf-d08f-4fa7-a80a-a9d3229eb535/HTML","dcterms:extent":"21 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-DR35NX24/040d6321-2fca-432f-973a-7f0c6c9e1b38/PDF","dcterms:extent":"565 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-DR35NX24/1309cdb4-6541-4366-b948-223ba38684e2/TEXT","dcterms:extent":"20 KB"}],"edm:TimeSpan":{"@rdf:about":"1992-1999","edm:begin":{"@xml:lang":"en","#text":"1992"},"edm:end":{"@xml:lang":"en","#text":"1999"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-DR35NX24","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-QKUCN2BD"},{"@xml:lang":"sl","#text":"Kovine zlitine tehnologije"}],"dcterms:issued":"1999","dc:creator":["Aljančič, Uroš","Irmančnik-Belič, Lidija","Koller, Lidija","Požun, Karol","Praček, Borut","Remškar, Maja"],"dc:format":[{"@xml:lang":"sl","#text":"številka:1/2"},{"@xml:lang":"sl","#text":"letnik:33"},{"@xml:lang":"sl","#text":"str. 165-170"}],"dc:identifier":["ISSN:1318-0010","COBISSID:143018","URN:URN:NBN:SI:doc-DR35NX24"],"dc:language":"sl","dc:publisher":[{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},{"@xml:lang":"sl","#text":"Železarna Jesenice"},{"@xml:lang":"sl","#text":"Železarna Ravne"},{"@xml:lang":"sl","#text":"Železarna Štore"}],"dc:subject":[{"@xml:lang":"sl","#text":"naprševanje"},{"@xml:lang":"sl","#text":"platina"},{"@xml:lang":"sl","#text":"polimeri"},{"@xml:lang":"sl","#text":"relativna vlažnost"},{"@xml:lang":"sl","#text":"senzorji"},{"@rdf:resource":"http://www.wikidata.org/entity/Q880"}],"dcterms:temporal":{"@rdf:resource":"1992-1999"},"dc:title":{"@xml:lang":"sl","#text":"Študij napršenih tankih plasti platine na polimerno podlago| Study of Pt thin films sputtered on polymer substrate|"},"dc:description":[{"@xml:lang":"sl","#text":"Pt thin film sputtered on plymer substrate forms the active structure of the relative humidity sensor. Due to exellent Pt electrical characteristics and corrosion resistivity it is of vital importance to throughly study the morphological properties of Pt. The propeties of Pt layer on polymer substrate were studied under different deposition conditions. The paper focuses on the morphological structure properties only. The structure properties of Pt films sputtered on polymer and KCl were studied by TEM. The film surface topography and diameter of the detected Pt islands were determined by AFM. The 10 and 20 nm thick Pt layers were deposited on the polymer substrate surface. The influence of substrate temperature on morphological properties was studied. The sample obtained on substrates at room temperature shows a discontinuous Pt layer structure with obvious cracks in it. The 20 nm thick Pt layer deposited on polymer result in nearly continuous polycrystalline film"},{"@xml:lang":"sl","#text":"Tanki plasti plantine smo napršili na polimerno podlago kot aktivni elektrodni plasti kapacitivnega senzorja relativne vlažnosti zraka. Odlične električne lastnosti tanke plasti platine in velika korozijska odpornost kot najpomembnejši lasstnosti sta nas vodili k podrobnejši analizi morfoloških lastnosti platinskih plasti. Nanašali smo jih pri različnih naprševalnih pogojih, analizo pa smo usmerili na njihove morfološke strukturne lastnosti. Na elektronskem presevnem mikroskopu (TEM) smo analizirali strukturne lastnosti platinskih plasti, napršenih na polimerno podlago in monokristalno podlago KCl. Topografijo površine platinskih plasti in povprečno velikost otočkov v teh plasteh smo določili z mikroskopijo na atomsko silo (AFM). Na polimerno podlago smo napršili plasti platine debeline 10 in 20 nm. To smo naredili pri sobni temperaturi in študirali vpliv na spremembo morfoloških lastnosti. Z naprševanjem plasti platine na polimerno podlago pri sobni temperaturi smo dobili pri debelini 10 nm nezvezno plast z razpokami. 20 nm debele plasti, napršene pri sobni temperaturi polimera, pa imajo zvezno plast brez razpok"},{"@xml:lang":"sl","#text":"Nadaljuje se kot: Materiali in tehnologije"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-DR35NX24","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-DR35NX24"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-DR35NX24/040d6321-2fca-432f-973a-7f0c6c9e1b38/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-DR35NX24/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-DR35NX24"}}}}