<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-CSMMK5TL</identifier><date>1999</date><creator>Gawlik, Grzegorz</creator><creator>Jagielski, Jacek</creator><creator>Mozetič, Miran</creator><creator>Zalar, Anton</creator><relation>documents/doc/C/URN_NBN_SI_doc-CSMMK5TL_001.pdf</relation><relation>documents/doc/C/URN_NBN_SI_doc-CSMMK5TL_001.txt</relation><format format_type="issue">2</format><format format_type="volume">29</format><format format_type="type">article</format><format format_type="extent">str. 61-67</format><identifier identifier_type="ISSN">0352-9045</identifier><identifier identifier_type="COBISSID">38370</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-CSMMK5TL</identifier><language>eng</language><publisher>Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</publisher><source>Informacije MIDEM</source><rights>InC</rights><subject language_type_id="slv">dopiranje</subject><subject language_type_id="slv">implantacija</subject><subject language_type_id="slv">ioni</subject><subject language_type_id="slv">površine</subject><subject language_type_id="slv">tanke plasti</subject><title>Ion implantation; a modern tool of surface engineering</title><title>Ionska implantacija, sodobna metoda za obdelavo površin</title></Record>