22 KB1977 KB19 KB198120221999Kovač, JanezKunert, MaikPraček, BorutZalar, Antonštevilka:1letnik:194 stranistr. 20-23ISSN:0351-9716COBISSID:36322URN:URN:NBN:SI:doc-CP44L562slDruštvo za vakuumsko tehniko SlovenijeVakuumistkarakterizacijakromov nitridpovršineprevleketanke plastiKarakterizacija krom-nitridne prevleke, nanesene na nerjavno jeklo s postopkom IBAD|Chromium-nitride coatings can provide a hard, wear-resistent surface for stainless steel components. In the frames of the Co-ordinated Research Program on the "Modification of Materials by Ion Treatment for Industrial Applications", organized by the International Atomic Energy Agency, the chromium-nitride coating on stainless steel (SS304) was characterized in twelve different laboratories. Here we report on the results obtained in the Laboratory of surface and thin film analysis at the Institute of Surface Engineering and Optoelectronics. The stainless steel substracts were coated with about 1mum thick nonstoichiometric CrN. The samples were prepared by Spire Corporation of Bedford, Massachusetts in USA, using the Ion Beam Assisted Deposition (IBAD) technique. The polished stainless steel substrates were coated in one batch using rotational and translational substrate holders to achieve uniform coating thickness and composition. Chromium was evaporated with an electron gun while nitrogen was supplied to the coating by an ion gun. For the characterization and analytical testing we performed Auger electron spectroscopy (AES), X-ray photoelectron spectroscopy and atomic force microscopy (AFM)Krom-nitridne prevleke, nanesene na podlage iz nerjavnega jekla, omogočijo, da so površine trde in obrabno obstojne. V okviru skupnega raziskovalnega programa "Modifikacija materialov z ionsko obdelavo za industrijsko uporabo", ki ga je organizirala Mednarodna agencija za atomsko energijo (IAEA), je bila trda prevleka kriptona CrN z nestehiometrično sestavo nanesena na jeklene podlage (SS304) in preiskana v dvanajstih laboratorijih. Tu poročamo o rezultatih raziskav sodelavcev Laboratorija za analizo površin in tankih plasti Inštituta za tehnologijo površin in optoelektroniko v Ljubljani. Jeklene podlage so prekrili z okrog 1mim debelo prevleko CrN v laboratoriju Spire Corporation v Bedfordu, Massachusetts, ZDA. Za nanos so uporabili postopek IBAD-Ion Beam Assisted Deposition, med naparevanjem kroma z elektronskim curkom pa so tanko plast obstreljevali z ioni dušika. Za doseganje enakomerne debeline in sestave tanke plasti so se med postopkom njenega nanašanja jeklene podlage pomikale prečno nad izviroma Cr in N in se obenem vrtele. Za karakterizacijo krom-nitridne plasti smo uporabili spektroskopijo Augerjevih elektronov (AES), rentgensko fotoelektronsko spektroskopijo (XPS), mikroskop na atomsko silo (AFM), izmerili pa smo tudi njeno trdoto in Youngov modulTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaDruštvo za vakuumsko tehniko Slovenije