40 KB2091 KB39 KB199219991997Jenko, Monika11 straniletnik:31številka:6str. 507-517ISSN:1318-0010COBISSID:39338URN:URN:NBN:SI:doc-CET86YF4enInštitut za kovinske materiale in tehnologijeŽelezarna JeseniceŽelezarna RavneŽelezarna ŠtoreKovine zlitine tehnologijeantimonantimonyfizika kondenzirane materijefizika površinindijkositerkovinekovinski oksidisegregacijatanke plastiUltra thin deposited and segregated films| dedicated to prof. Jože Gasperič at the occasion of his 65th birthday| Ultra tanke nanesene in segregirane plasti|Research, development and use of vacuum and thin films started at the Institute for Electronics and Vacuum Techniques, IEVT, Ljubljana, after its foundation around 1950. With the development of miniature thin film potentiometers and thin films resistors of high stability at IEVT the first production of thin film electronic components in former Yugoslavia was established. The technology was successfully transferred to Slovenian foreign factory in Cormons Italy where Slovenian minority is living. At the same time the high tech research and development of the second and third generation image intensifier tubes was started. Prof. Dr. Jože Gasperič was one of the leading scientists investigating the sputtered cermet thin films in his BS and Ph.D works.His findings are basic for understanding the mechanism of growth of thin sputtered cermet films. In the middle of the eighties an experimental ultra high vacuum, UHV, system equipped with Auger spectrometer, was built at IEVT and the investigation of physical and chemical processes of ultra thin oxide film growth on the surface of liquid indium and indium alloysin situ was achieved for the first time. The experimental method based on Auger Electron Spectroscopy for in situ investigation of the initial phase of the ultra thin oxide film growth on liquid indium, was developed at the institute. The modified experimental method was also used for the study of ultra thin segregated Sb, Sn or Se films on the surface of FeSiC alloy, microalloyed by Sb, Sn or Se. The investigation of ultra thin Sn, Sb or Se films on well defined Fe surfaces is the topic of our present research which is close connected with the purchase of new AES/XPS instrument with the very high spatial resolution. The results of investigations of ultra thin oxide films on the liquid indium and InSn alloy as well as Sb and Sn ultra thin film growth on the surface of FeSiC alloy were presentedPrve raziskave, razvoj in uporaba vakuumskih tankih plasti so se začele na Inštitutu za elektroniko in vakuumsko tehniko v Ljubljani takoj po ustanovitvi, okrog leta 1950. Z razvojem miniaturnega tankoplastnega potenciometra MP in stabilnih tankoplastnih miniaturnih uporov se je pričela na IEVT tudi nova proizvodnja tankoplastnih elektronskih komponent v takratni Jugoslaviji. Tehnologija izdelave MP je bila uspešno prenesena v novo ustanovljeno slovensko zamejsko tovarno v Krminu v Italiji. Obenem pa so se vršile raziskave in razvoj specialnih fotoelektronk, Sb fotokatod druge in tretje generacije za slikovne ojačevalnike z bližinskim prenosom slike, ki je predstavljal "high-tech" v svetovnem merilu. Vakuumisti IEVT so s svojim znanjem sodelovali v svetovno znanih institucijah kot npr.: SAES Geters, Heimann, Leybold Heraeus. Skupne rezultate so že takrat objavili v tuji znanstveni periodiki. Z raziskavami vakuumskih tankih plasti se je na IEVT intenzivno ukvarjal tudi prof. dr. Jože Gasperič, ki je problematiko kermetnih napršenih plasti obdelal v svojem magistrskem in nato še v doktorskem delu. Njegova temeljna spoznanja so pomembno prispevala k razumevanju mehanizma rasti tankih napršenih plasti. Z izgradnjo eksperimentalnega ultravisoko vakuumskega sistema, opremljenega s spektrometrom Augerjevih elektronov na IEVT v sredini osemdesetih let pa je bila dana možnost raziskav fizikalno kemijskih procesov pri nastanku ultra tankih oksidnih plasti na površini tekočih kovin in zlitin "in situ". Tovrstne raziskave so bile izvedene prvič. Načrtovana in osvojena je bila nova eksperimentalna metoda, ki je omogočila študij začetnih stopenj rasti oksidnih plasti na tekočem indiju, ki smo ga tudi napaarili in situ v spektrometru Augerjevih elektronov. Metoda je bila uporabljena tudi za študij ultra tankih segregiranih plasti Sb, Sn in Se na površini zlitin Fe-Si-C, mikrolegiranih z Sb, Sn ali Se. Študij ultra tankih plasti Sb, Sn, Se na dobro definiranih površinah Fe in V pa je preadmet naših sedanjih raziskav, kiso vezane na nabavo novega AES/XPS instrumenta z visoko lateralno ločljivostjo. Prikazani so rezultati raziskav ultra tankih oksidnih plasti na tekočem indiju na zlitini InSn ter ultra tankih segregiranih Sb in Sn plasti na zlitini FeSiCTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of Slovenia