1285 KB29 KB199920252016She, DongshengWei, ZefeiYang, YiliuYu, Zhenletnik:62številka:nr. 9str. 534-542ISSN:0039-2480COBISSID_HOST:14808091URN:URN:NBN:SI:doc-CCSDFKDGenZveza strojnih inženirjev in tehnikov Slovenije etc.Strojniški vestniklaserski Dopplerjev vibrometermikrokonzolapreizkušanje dinamičnih karakteristiktemperaturni količnik lastne frekvenceudarni valvisoka temperaturaDynamic characterization of microcantilevers with a shock wave excitation method under high temperature|Aiming at the dynamic characteristics of silicon microcantilevers under a high-temperature environment, a shock wave excitation method was proposed, and a dynamic testing system with high-temperature loading unit for MEMS microstructures was established. In the system, the shock wave generated by electrical discharging was used to excite the testing microcantilever. The vibration response signals were acquired by laser Doppler vibrometer system. A T-shaped microcantilever and a microcantilever with uniform rectangular crossing section were fabricated and tested under the high-temperature environment ranging from 299 K to 773 K. Their temperature coefficients of natural frequency were obtained. The results show that for both two microcantilevers, the temperature coefficients of the natural frequency is very close to each other, which is only decided by the temperature coefficient of the elastic modulus and the linear thermal expansion coefficientsSenzorji in aktuatorji MEMS za visoke temperature imajo velik potencial na različnih področjih, kot so avtomobilska, letalska in vesoljska, oborožitvena in jedrska industrija. Na učinkovitost delovanja naprav MEMS močno vplivajo dinamične karakteristike njihove notranje mikrostrukture, zato je nujna preučitev dinamičnih značilnosti mikrostrukture v visokotemperaturnem okolju. Pomemben parameter zasnove MEMS je temperaturni količnik lastne frekvence (TCF). Na podlagi TCF je mogoče napovedati variabilnost resonančnih frekvenc mikrostruktur v režimu spreminjajoče se temperature. Za eksperimentalno določitev vrednosti TCF za mikrostrukture je potreben sistem za dinamično preizkušanje z enoto za toplotno obremenjevanjeTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaUniverza v Ljubljani, Fakulteta za strojništvo