<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-B4E9DREG</identifier><date>1991</date><creator>Bele, Zlatko</creator><creator>Maček, Marijan</creator><creator>Ročak, Rudolf</creator><creator>Šorli, Iztok</creator><relation>documents/doc/B/URN_NBN_SI_doc-B4E9DREG_001.pdf</relation><relation>documents/doc/B/URN_NBN_SI_doc-B4E9DREG_001.txt</relation><format format_type="issue">1</format><format format_type="volume">21</format><format format_type="extent">21, št. 1 (marec 1991), str. 11-21</format><format format_type="type">article</format><identifier identifier_type="ISSN">0352-9045</identifier><identifier identifier_type="COBISSID">22923522</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-B4E9DREG</identifier><language>slv</language><publisher>Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</publisher><source>Informacije MIDEM</source><rights>InC</rights><subject language_type_id="slv">mikroelektronika</subject><subject language_type_id="slv">polprevodniki</subject><title>Pogoji za moderno mikroelektronsko proizvodnjo</title></Record>