{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-A58SYQ78/04eeecbe-b839-4b76-b7f5-38fb706dbaa3/HTML","dcterms:extent":"23 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-A58SYQ78/01c2c31e-9d41-4fe4-b910-82f95b23aab7/PDF","dcterms:extent":"1967 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-A58SYQ78/4913fe2b-9fb3-49fc-a384-dc46b84600e9/TEXT","dcterms:extent":"18 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-A58SYQ78","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"1998","dc:creator":["Kovač, Janez","Mozetič, Miran","Vesel, Alenka"],"dc:format":[{"@xml:lang":"sl","#text":"letnik:18"},{"@xml:lang":"sl","#text":"številka:4"},{"@xml:lang":"sl","#text":"5 strani"},{"@xml:lang":"sl","#text":"str. 14-18"}],"dc:identifier":["ISSN:0351-9716","COBISSID:32738","URN:URN:NBN:SI:doc-A58SYQ78"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"interakcije"},{"@xml:lang":"sl","#text":"ioni"},{"@xml:lang":"sl","#text":"plini"},{"@xml:lang":"sl","#text":"računalniška simulacija"},{"@xml:lang":"sl","#text":"razprševanje"},{"@rdf:resource":"http://www.wikidata.org/entity/Q925667"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Izračun koeficienta razprševanja|"},"dc:description":[{"@xml:lang":"sl","#text":"If a surface is subjected to bombardment by energetic particles it is eroded and surface atoms are removed. This process is known as sputtering. Sputteringis caused by collisions of the incoming ions with the surface atoms and also by collisions between the atoms themselves in a solid (collision cascades). The collision cascades are spreading in all directions. If a cascade leads to the surface, one or more aatoms can leave the surface layer of a solid. This happens if the kinetic energy of the atom is larger than its surface binding energy. The erosion in sputtering is determined by the sputtering yield defined as the mean number of atoms removed per incident ion. The sputtering yield can be experimentally measured or theoretically evaluated. It can be also calculated with a computer simulation of collision cascades. In this paper the Sigmund multiple collision theory is described and IBM's program SRIM presented, which is used for simulating the formation of collision cascades"},{"@xml:lang":"sl","#text":"Obstreljevanje površine z energijskimi ioni povzroči razprševanje atomov, to je odnašanje (erozija) površine trdne snovi. Razprševanje povzročajo tako trki vpadnih ionov z atomi na površini trdne snovi kot tudi medsebojni trki atomov trdne snovi (trkovne kaskade). Trkovne kaskade se razširjajo v vseh smereh. Če doseže kaskada površino snovi, lahko le-to zapusti eden ali več atomov. To se seveda zgodi le v primeru, če je njegova kinetična energija večja od površinske vezavne energije. Velikost erozije pri razprševanju nam pove koeficient razprševanja, ki je definiran kot število atomov, ki jih izbije vpadni ion. Koeficient razprševanja lahko eksperimentalno izmerimo, lahko ga ocenimo teoretično, lahko pa ga dobimo tudi z računalniško simulacijo kaskade trkov. V članku najprej opisujemo Sigmundovo teorijo razprševanja, natao pa predstavljamo IBM-ov program SRIM, s katerim simuliramo nastanek trkovnih kaskad"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-A58SYQ78","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-A58SYQ78"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-A58SYQ78/01c2c31e-9d41-4fe4-b910-82f95b23aab7/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-A58SYQ78/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-A58SYQ78"}}}}