{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-88GQU5UK/28084984-2e6e-418f-9841-f0afcc9e9330/HTML","dcterms:extent":"13 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-88GQU5UK/f0a62fcf-b605-48b5-8d48-42d8529e963f/PDF","dcterms:extent":"251 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-88GQU5UK/4ce2d62d-6967-4874-860b-10920bcb5177/TEXT","dcterms:extent":"12 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-88GQU5UK","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"2003","dc:creator":["Mozetič, Miran","Vesel, Alenka"],"dc:format":[{"@xml:lang":"sl","#text":"številka:1"},{"@xml:lang":"sl","#text":"letnik:23"},{"@xml:lang":"sl","#text":"3 strani"},{"@xml:lang":"sl","#text":"str. 16-18"}],"dc:identifier":["ISSN:0351-9716","COBISSID:17494567","URN:URN:NBN:SI:doc-88GQU5UK"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"ionske črpalke"},{"@xml:lang":"sl","#text":"vakuumska tehnika"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Magnetronska ionsko-razprševalna črpalka| Magnetron sputter-ion pump|"},"dc:description":[{"@xml:lang":"sl","#text":"In this contribution we describe a new type of sputter-ion pump that consists of a combination of Penning and magnetron cells. The dependence of discharge current versus the anode voltage and the pressure was investigated. Results showed that a stable discharge was established in the pressure range between 1x10 sup-8 mbar and 1x10sup -6 mbar. At low voltage the dependence of discharge current versus pressure was linear, while at high voltage the curve broke at the pressure of 1x10sup -7 mbar"},{"@xml:lang":"sl","#text":"V prispevku prikazujemo konstrukcijo novega tipa ionske-razprševalne črpalke, ki je sestavljena iz kombinacije Penningovih in magnetronskih celic. Raziskovali smo odvisnost razelektritvenega toka v novi črpalki od delovne napetosti in tlaka. Rezultati so pokazali, da dobimo stalno razelektritev v območju med 1x10 nad-8 mbar in 1x10nad -6 mbar. Pri razmeroma nizki napetosti je odvisost toka od tlaka linearna, pri višji napetosti pa se karakteristika zlomi pri tlaku okoli 1x10nad-7 mbar"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-88GQU5UK","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-88GQU5UK"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-88GQU5UK/f0a62fcf-b605-48b5-8d48-42d8529e963f/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-88GQU5UK/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-88GQU5UK"}}}}