<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-84O51EM9</identifier><date>1993</date><creator>Gasperič, Jože</creator><creator>Godec, Matjaž</creator><creator>Kraševec, Viktor</creator><creator>Navinšek, Boris</creator><creator>Panjan, Peter</creator><creator>Remškar, Maja</creator><relation>documents/znanstveni_clanki/kovine_zlitine_tehnologije/html/URN_NBN_SI_doc-84O51EM9.html</relation><relation>documents/znanstveni_clanki/kovine_zlitine_tehnologije/pdf/URN_NBN_SI_doc-84O51EM9.pdf</relation><relation>documents/znanstveni_clanki/kovine_zlitine_tehnologije/txt/URN_NBN_SI_doc-84O51EM9.txt</relation><format format_type="issue">1/2</format><format format_type="volume">27</format><format format_type="main">5 strani</format><format format_type="type">article</format><format format_type="extent">str. 97-101</format><identifier identifier_type="ISSN">1318-0010</identifier><identifier identifier_type="COBISSID">5818919</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-84O51EM9</identifier><language>slv</language><publisher>Inštitut za kovinske materiale in tehnologije</publisher><publisher>Železarna Jesenice</publisher><publisher>Železarna Ravne</publisher><publisher>Železarna Štore</publisher><source>Kovine zlitine tehnologije</source><rights>InC</rights><subject language_type_id="slv">elektronska mikroskopija</subject><subject language_type_id="slv">jedkanje</subject><subject language_type_id="slv">mikroelektronika</subject><subject language_type_id="slv">silicij</subject><subject language_type_id="slv">tanke plasti</subject><subject language_type_id="eng">titan</subject><title>TEM analiza prerezov (XTEM) tankih plasti</title></Record>