<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-6J6TWI7Y</identifier><date>1990</date><creator>Klanjšek Gunde, Marta</creator><relation>documents/doc/6/URN_NBN_SI_doc-6J6TWI7Y_001.pdf</relation><relation>documents/doc/6/URN_NBN_SI_doc-6J6TWI7Y_001.txt</relation><format format_type="issue">2</format><format format_type="volume">20</format><format format_type="type">article</format><format format_type="extent">str. 83-86</format><identifier identifier_type="ISSN">0352-9045</identifier><identifier identifier_type="COBISSID">1916698</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-6J6TWI7Y</identifier><language>slv</language><publisher>Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</publisher><source>Informacije MIDEM</source><rights>InC</rights><subject language_type_id="slv">silicijevi oksidi</subject><subject language_type_id="slv">tanke plasti</subject><title>Silicone oxide films</title><title>Tankoplastni silicijevi oksidi</title></Record>