{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-521WHUUQ/55b9cd67-7ea2-42e2-90eb-45899e23ee0f/HTML","dcterms:extent":"8 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-521WHUUQ/9edc7cf3-f639-4e1d-97ce-4a1533a57687/PDF","dcterms:extent":"422 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-521WHUUQ/a60c2147-72cd-40d9-bffa-3be341c0c80a/TEXT","dcterms:extent":"7 KB"}],"edm:TimeSpan":{"@rdf:about":"1992-1999","edm:begin":{"@xml:lang":"en","#text":"1992"},"edm:end":{"@xml:lang":"en","#text":"1999"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-521WHUUQ","edm:isNextInSequence":{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:doc-5NN24DGR"},"dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-QKUCN2BD"},{"@xml:lang":"sl","#text":"Kovine zlitine tehnologije"}],"dcterms:issued":"1997","dc:creator":["Berič, Boris","Drab, Marjan","Pregelj, Andrej","Sulčič, Slavko"],"dc:format":[{"@xml:lang":"sl","#text":"3 strani"},{"@xml:lang":"sl","#text":"številka:3/4"},{"@xml:lang":"sl","#text":"letnik:31"},{"@xml:lang":"sl","#text":"str. 281-283"}],"dc:identifier":["ISSN:1318-0010","COBISSID:66986","URN:URN:NBN:SI:doc-521WHUUQ"],"dc:language":"sl","dc:publisher":[{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},{"@xml:lang":"sl","#text":"Železarna Jesenice"},{"@xml:lang":"sl","#text":"Železarna Ravne"},{"@xml:lang":"sl","#text":"Železarna Štore"}],"dc:subject":[{"@xml:lang":"sl","#text":"avtomatizacija"},{"@xml:lang":"sl","#text":"krmilni sistemi"},{"@xml:lang":"sl","#text":"računalniško krmiljenje"},{"@xml:lang":"sl","#text":"vakuumski sistemi"},{"@rdf:resource":"http://www.wikidata.org/entity/Q184199"}],"dcterms:temporal":{"@rdf:resource":"1992-1999"},"dc:title":{"@xml:lang":"sl","#text":"Avtomatizacija postopka naprševanja na laboratorijskem visokovakuumskem sistemu| Automation of the sputtering process on high vacuum lab system|"},"dc:description":[{"@xml:lang":"sl","#text":"The modern vacuum systems have valves and other elements PC or PLC controlled. For safety reasons all movements are checked in real time and adapted to real values of pressure temperature, current, thickness of sputtering layer, etching time etc. Motion, pressure and other sensors are essential. In data analyzing and motion control microprocessor plays important role. This article describes development of automated module for controlling the Lab High Vacuum System"},{"@xml:lang":"sl","#text":"V vseh sodobnih vakuumskih sistemih upravljamo ventile in druge elemente indirektno z elektromagnetno pnevmatiko. Zaradi varnosti mora biti vklučena kontrola sproženih gibov, tehnološki proces pa zahteva še prirejenost teh dejanj spreminjajočim se parametrom, kot so tlak, temperatura, jakost toka, debelina nastajajoče tanke plasti, čas jedkanja itd. Potrebni so torej senzorji gibov in drugih pomembnih veličin. Za celotno obravnavanje podatkov ter upravljanje elementov in s tem vodenje procesa se vse bolj uveljavlja uporaba mikroprocesorjev. Prispevek opisuje razvoj in izvedbo računalniškega krmiljenja, ki je bilo vgrajeno v visokovakuumski črpalni sistem VS 10"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-521WHUUQ","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-521WHUUQ"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-521WHUUQ/9edc7cf3-f639-4e1d-97ce-4a1533a57687/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:dataProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-521WHUUQ/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-521WHUUQ"}}}}