16 KB1884 KB14 KB198120221997Resnik, Dragoletnik:17številka:44 stranistr. 4-7ISSN:0351-9716COBISSID:984148URN:URN:NBN:SI:doc-4MP70BEDslDruštvo za vakuumsko tehniko SlovenijeVakuumistanizotropno jedkanjeelektronski elementimikroobdelavapovršinska obdelavasilicijMikroobdelava silicija|This paper present an overview of techniques and fields involved in advanced micromachining of silicon. As the market demands new and sophisticated sensorsand actuators in a various fields of nowadays life, the micromachining as a tool in a constant progress, sometimes even ahead of manufactures needs. As a supplement to microelectronics it is capable to offer new solutions in area of micromechanical systemsTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaDruštvo za vakuumsko tehniko Slovenije