{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-346GX77M/8eaf1fd8-35b1-4d54-9967-610ab721d014/HTML","dcterms:extent":"19 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-346GX77M/3e8ff3a3-be1e-423f-a398-c19c316e360d/PDF","dcterms:extent":"405 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-346GX77M/c9431207-2f67-45c4-87cc-58c745d93210/TEXT","dcterms:extent":"17 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-346GX77M","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"2006","dc:creator":"Zupanič, Franc","dc:format":[{"@xml:lang":"sl","#text":"letnik:26"},{"@xml:lang":"sl","#text":"številka:4"},{"@xml:lang":"sl","#text":"6 strani"},{"@xml:lang":"sl","#text":"str. 4-9"}],"dc:identifier":["ISSN:0351-9716","COBISSID:11145750","URN:URN:NBN:SI:doc-346GX77M"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"fokusirani ionski curek"},{"@xml:lang":"sl","#text":"mikroskop"},{"@xml:lang":"sl","#text":"nanašanje materiala"},{"@xml:lang":"sl","#text":"odvzemanje materiala"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Tehnologija fokusiranega ionskega curka (FIB)|"},"dc:description":[{"@xml:lang":"sl","#text":"Focussed ion beam has a diameter between 5 nm and a few micrometers. Its resolution is slightly worse than that of a scanning electron microscope; however, it possesses much better orientation contrast. It allows site-specific sputtering and deposition of materials with precision of at least 100 nm. This ability allows FIB application in different fields: repairing of electronic circuits, 3D-microscopy, 3D-fabrication of objects in nano- and micro regions. The combination of a scanning electron microscopeand a FIB provides enhanced capabilities of both"},{"@xml:lang":"sl","#text":"Fokusirani ionski curek (FIB) ima premer od 5 nm do nekaj mikrometrov. Ko ga uporabljamo kot mikroskop, je njegova ločljivost nekoliko slabša, kot je ločljivost vrstičnega elek- tronskega mikroskopa, vendar ima bistveno boljši orientacijski kontrast. Z njim lahko odvzemamo ali nanašamo material na izbranih mestih z natančnostjo vsaj 100 nm. Ta značilnost omogoča, da se uporablja v najrazličnejše namene, od popravila elektronskih vezij, preko 3D-mikroskopije, do izdelave najrazličnejših 3D-objektov v nano- in mikrometrskem področju. Kombinacija fokusiranega ionskega curka in vrstičnega elektronskega mikroskopa bistveno izboljša zmogljivosti obeh"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-346GX77M","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-346GX77M"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-346GX77M/3e8ff3a3-be1e-423f-a398-c19c316e360d/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-346GX77M/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-346GX77M"}}}}