678 KB24 KB199920252013Dick, Andrew J.številka:1letnik:59str. 50-55, SI 8ISSN:0039-2480COBISSID:13069083URN:URN:NBN:SI:doc-1VCHZ3WNenAssociation of Mechanical Engineers and Technicians of Slovenia et al.Zveza strojnih inženirjev in tehnikov Slovenije et al.Strojniški vestnikmicro-beam resonatorsnelinearna nihanjanonlinear oscillationspiezoelectric materialpiezoelektrični materialresonator z mikronosilcemCharacterizing effective d sub 31 values for PZT from the nonlinear oscillations of clamped-clamped micro-resonators|In order to accurately predict the performance of micro-electromechanical systems which use piezoelectric material, precise knowledge of the piezoelectric coefficients is critical. Current material characterization methods rely on either simple structures restricted to small amplitude, linear oscillations or consider the piezoelectric material separate from the specific micro-scale device. A method is proposed for the characterization of the effective transverse piezoelectric coefficient d31 of lead zirconate titanate in a clamped-clamped micro-beam resonator experiencing nonlinear oscillations. Parameter trends identified by using a parametric identification scheme are analyzed and an approach is presented to calculate the linear piezoelectric coefficient. This method utilizes the relationship between a DC bias added to the excitation signal and the frequency shift experienced by the nonlinear response behavior. Through an additional numerical study, the sensitivity of the results to changes in the device length is identified and all data sets provide the same coefficient value when a length variation of less than 2% is allowedTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaUniverza v Ljubljani, Fakulteta za strojništvo