20 KB138 KB18 KB199219991998Kadlec, StanislavMaček, MarijanNavinšek, BorisPanjan, Peterletnik:32številka:6str. 561-565ISSN:1318-0010COBISSID:95146URN:URN:NBN:SI:doc-1J3M7R31enInštitut za kovinske materiale in tehnologijeŽelezarna JeseniceŽelezarna RavneŽelezarna ŠtoreKovine zlitine tehnologijeionizacijaplazmaspektroskopijatitanEnergy and mass distributions of ions during depostition! of TiN by triode ion plating in BAI 730 M| Energijske in masne porazdelitve ionov med depozicijo TiN v triodnem sistemu BAI 730 M|On the basis of the results of the energy and mass spectroscopy, it was found that low voltage arc in combinataion with the arrangements of electrodes and coils to form the weak mirror magnetic vessel very efficiently ionize the gas and evaporate metal species in triode ion plating system BAI 730 M. Results show that the 95% of the Ti ion flux during the deposition of TiN consists of double charged ?$Ti^{++}$? ions accelerated toward the substrate with energiesfrom 90 to 120 eV. The rest (=5%) of Ti ions have energies from 45-60 eV (?$Ti^+$?) and about 0.1% even have energies over 135 eVNa osnovi rezultatov energijske in masne spektroskopije smo ugotovili, da je možno v triodnem depozicijskem sistemu BAI 730 M z nizkonapetostnim lokom s kombinacijo elektrod in tuljav na način, ki formira šibko zrcalno magnetno posodo, zelo efektivno ionizirati plin in izparevati kovine. Rezultati kažejo,da 95% ionskega toka predstavljajo dvakrat nabiti ioni ?$Ti^{++}$? , ki bombardirajo površino podlag z energijo 90-120 eV. Ostanek (=5%) so enkrat nabiti ioni ?$Ti^+$? z energijo od 45-60 eV, medtem ko je delež trikrat trikrat nabitih ionov ?$Ti^{3+}$? energijo preko 135 eV okrog 0,1%Nadaljuje se kot: Materiali in tehnologijeTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije