{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-1B4JE8PG/c0caf14a-2894-4a70-87ed-baeeddb7c59b/HTML","dcterms:extent":"20 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-1B4JE8PG/5a7c37ad-49ae-4353-a1f7-2bbb86827f3b/PDF","dcterms:extent":"1966 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:doc-1B4JE8PG/31398bca-8026-4085-86cd-c8dcd6eec697/TEXT","dcterms:extent":"18 KB"}],"edm:TimeSpan":{"@rdf:about":"1981-2022","edm:begin":{"@xml:lang":"en","#text":"1981"},"edm:end":{"@xml:lang":"en","#text":"2022"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:doc-1B4JE8PG","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-I8EIVSM5"},{"@xml:lang":"sl","#text":"Vakuumist"}],"dcterms:issued":"2002","dc:creator":"Jug, Nina","dc:format":[{"@xml:lang":"sl","#text":"številka:2/3"},{"@xml:lang":"sl","#text":"letnik:22"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"str. 13-16"}],"dc:identifier":["ISSN:0351-9716","COBISSID:17026343","URN:URN:NBN:SI:doc-1B4JE8PG"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"dc:subject":[{"@xml:lang":"sl","#text":"modeli"},{"@xml:lang":"sl","#text":"nastanek"},{"@xml:lang":"sl","#text":"tanke plasti"},{"@xml:lang":"sl","#text":"termodinamika"},{"@rdf:resource":"http://www.wikidata.org/entity/Q11473"}],"dcterms:temporal":{"@rdf:resource":"1981-2022"},"dc:title":{"@xml:lang":"sl","#text":"Mehanizmi rasti vakuumskih tankih plasti| Growth mechanisms of PVD films|"},"dc:description":[{"@xml:lang":"sl","#text":"In the present paper the basis for the thermodynamic model of thin film growth is introduced. The evapoated material is treated as small droplet on substrate surface and the growth type depends on equilibrium between substrate, evaporated material, and intermediate layer surface tension. Furher,the diffusion of evaporated atoms in the surface potential is described giving the basis for the microscopic model for thin film growth. Due to different mobility and absrption energy at nucleation sites such as surface steps and island edges, different growth modes can be distinguished. Finally, few examples of amorphous, polycrystal and monocrystal thin films are given"},{"@xml:lang":"sl","#text":"V članku je kratko predstavljena osnova za termodinamski model rasti tankih plasti, ki temelji na ravnovesju površinskih napetosti med naparevancem, podlago in mejno plastjo, pri čemer naparevanec obravnava kot majhno kapljico na površini podlage. V nadaljevanju je opisana difuzija atomov naparevanca v potencialu na površini podlage, ki je osnova mikroskopskega modela rasti tankih plasti. Različni načini rasti so posledica različne gibljivosti atomov naparevanca in različnih vezavnih energij na nukleacijskih mestih, kot so površinske stopnice in robovi že obstoječih otočkov. Za konec je navedenih nekaj primerov amorfnih, polikristalnih in monokristalnih tankih plasti"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:doc-1B4JE8PG","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:doc-1B4JE8PG"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:doc-1B4JE8PG/5a7c37ad-49ae-4353-a1f7-2bbb86827f3b/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Društvo za vakuumsko tehniko Slovenije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:doc-1B4JE8PG/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:doc-1B4JE8PG"}}}}