<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-1B4JE8PG</identifier><date>2002</date><creator>Jug, Nina</creator><relation>documents/znanstveni_clanki/vakuumist/html/urn_nbn_si_doc-1b4je8pg.html</relation><relation>documents/znanstveni_clanki/vakuumist/pdf/urn_nbn_si_doc-1b4je8pg.pdf</relation><relation>documents/znanstveni_clanki/vakuumist/txt/urn_nbn_si_doc-1b4je8pg.txt</relation><format format_type="issue">2/3</format><format format_type="volume">22</format><format format_type="main">4 strani</format><format format_type="type">article</format><format format_type="extent">str. 13-16</format><identifier identifier_type="ISSN">0351-9716</identifier><identifier identifier_type="COBISSID">17026343</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-1B4JE8PG</identifier><language>slv</language><publisher>Društvo za vakuumsko tehniko Slovenije</publisher><source>Vakuumist</source><rights>InC</rights><subject language_type_id="slv">modeli</subject><subject language_type_id="slv">nastanek</subject><subject language_type_id="slv">tanke plasti</subject><subject language_type_id="slv">termodinamika</subject><title>Growth mechanisms of PVD films</title><title>Mehanizmi rasti vakuumskih tankih plasti</title></Record>