<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-0LFZLHIN</identifier><date>1992</date><creator>Cvikl, Bruno</creator><relation>documents/znanstveni_clanki/vakuumist/html/URN_NBN_SI_doc-0LFZLHIN.html</relation><relation>documents/znanstveni_clanki/vakuumist/pdf/URN_NBN_SI_doc-0LFZLHIN.pdf</relation><relation>documents/znanstveni_clanki/vakuumist/txt/URN_NBN_SI_doc-0LFZLHIN.txt</relation><format format_type="issue">29</format><format format_type="main">6 strani</format><format format_type="type">article</format><format format_type="extent">str. 15-20</format><identifier identifier_type="ISSN">0351-9716</identifier><identifier identifier_type="COBISSID">4402180</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-0LFZLHIN</identifier><language>slv</language><publisher>Društvo za vakuumsko tehniko Slovenije</publisher><source>Vakuumist</source><rights>InC</rights><subject language_type_id="slv">metode</subject><subject language_type_id="slv">nanosi</subject><subject language_type_id="slv">tanke plasti</subject><subject language_type_id="slv">vakuumska tehnika</subject><title>Nanašanje tankih plasti po metodi curka ioniziranih skupkov, CIS</title></Record>