<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:doc-06MKQDK9</identifier><date>2000</date><creator>Južnič, Stanislav</creator><relation>documents/znanstveni_clanki/vakuumist/html/urn_nbn_si_doc-06mkqdk9.html</relation><relation>documents/znanstveni_clanki/vakuumist/pdf/urn_nbn_si_doc-06mkqdk9.pdf</relation><relation>documents/znanstveni_clanki/vakuumist/txt/urn_nbn_si_doc-06mkqdk9.txt</relation><format format_type="main">19 strani</format><format format_type="volume">20</format><format format_type="issue">3/4</format><format format_type="type">article</format><format format_type="extent">str. 15-33</format><identifier identifier_type="ISSN">0351-9716</identifier><identifier identifier_type="COBISSID">15669031</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-06MKQDK9</identifier><language>slv</language><publisher>Društvo za vakuumsko tehniko Slovenije</publisher><source>Vakuumist</source><rights>InC</rights><subject language_type_id="slv">fizika plazme</subject><subject language_type_id="slv">ionska implantacija</subject><subject language_type_id="slv">tranzistorji</subject><subject language_type_id="slv">zgodovinski pregledi</subject><title>Zgodovina ionske implantacije</title></Record>