<Record><identifier xmlns="http://purl.org/dc/elements/1.1/">URN:NBN:SI:DOC-Y4IWS172</identifier><date>1997</date><creator>Klanjšek Gunde, Marta</creator><relation>documents/doc/Y/URN_NBN_SI_doc-Y4IWS172_001.pdf</relation><relation>documents/doc/Y/URN_NBN_SI_doc-Y4IWS172_001.txt</relation><format format_type="issue">2</format><format format_type="volume">27</format><format format_type="type">article</format><format format_type="extent">str. 120-130</format><identifier identifier_type="ISSN">0352-9045</identifier><identifier identifier_type="COBISSID">823834</identifier><identifier identifier_type="URN">URN:NBN:SI:doc-Y4IWS172</identifier><language>eng</language><publisher>Strokovno društvo za mikroelektroniko, elektronske sestavne dele in materiale</publisher><source>Informacije MIDEM</source><rights>InC</rights><subject language_type_id="slv">analizna kemija</subject><subject language_type_id="slv">infrardeča spektroskopija</subject><subject language_type_id="slv">materiali</subject><subject language_type_id="slv">mikroelektronika</subject><subject language_type_id="slv">nečistoče</subject><subject language_type_id="slv">tanke plasti</subject><title>Infrared spectroscopy as analysing tool for materials used in microelectronics</title><title>Uporaba infrardeče spektroskopije pri analizi materialov za mikroelektronsko industrijo</title></Record>