{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XWXN9NP5/4c65eb49-4f70-409a-bc42-95b6e21ffa50/HTML","dcterms:extent":"29 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XWXN9NP5/03046274-8019-4f54-86fd-ea9eef3f27c2/PDF","dcterms:extent":"710 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XWXN9NP5/041e3c89-7ef3-4a8c-942f-fd0aa4c11259/TEXT","dcterms:extent":"26 KB"}],"edm:TimeSpan":{"@rdf:about":"2000-2024","edm:begin":{"@xml:lang":"en","#text":"2000"},"edm:end":{"@xml:lang":"en","#text":"2024"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-XWXN9NP5","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/urn:nbn:si:spr-ihg6vo21"},{"@xml:lang":"sl","#text":"Materiali in tehnologije"}],"dcterms:issued":"2011","dc:creator":["Cvelbar, Uroš","Eleršič, Kristina","Junkar, Ita","Modic, Martina","Vesel, Alenka","Zaplotnik, Rok"],"dc:format":[{"@xml:lang":"sl","#text":"številka:3"},{"@xml:lang":"sl","#text":"letnik:45"},{"@xml:lang":"sl","#text":"str. 232-239"}],"dc:identifier":["ISSN:1580-2949","COBISSID:859562","URN:URN:NBN:SI:doc-XWXN9NP5"],"dc:language":"en","dc:publisher":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"dc:subject":[{"@xml:lang":"sl","#text":"elektronska vrstična mikroskopija"},{"@xml:lang":"sl","#text":"grafit"},{"@xml:lang":"sl","#text":"kisikova plazma"},{"@xml:lang":"sl","#text":"morfologija"},{"@xml:lang":"sl","#text":"nanodelci"},{"@rdf:resource":"http://www.wikidata.org/entity/Q5309"}],"dcterms:temporal":{"@rdf:resource":"2000-2024"},"dc:title":{"@xml:lang":"sl","#text":"Modification of surface morphology of graphite by oxygen plasma treatment| Sprememba morfologije grafita med obdelavo s kisikovo plazmo|"},"dc:description":[{"@xml:lang":"sl","#text":"Samples of highly oriented pyrolitic graphite (HOPG) were exposed to fully dissociated oxygen plasma created by a radiofrequency discharge in pure oxygen. The discharge was powered with a radiofrequency generator operating at the standard industrial frequency of 13.56 MHz and the output power of 1000 W. Samples of pyrolitic graphite were in pieces with dimensions of 10 mm x 10 mm x (\"1.7) mm in high and exposed to plasma for different periods up to 90 s. The morphology of originally perfectly flat samples was monitored with a high resolution scanning electron microscope (SEM). Oxygen plasma caused non-homogeneous etching of samples. The first visible effect of plasma treatment was an appearance of rather spherical features of sub-micrometer dimensions as well as randomly oriented channel - like structures. Increasing the treatment time caused transformation of the spherical features into cones. The size of cones increased until about 40 s of plasma treatment. Large cones of few micrometers in size were observed at spots with surface dust particles. Prolonged treatment caused destruction of the cones and formation of sub-micrometer large holes. The effects were explained by interaction of highly excited oxygen Particles with surface carbon atoms"},{"@xml:lang":"sl","#text":"Vzorce visoko orientiranega pirolitskega grafita smo izpostavili delovanju popolnoma disociirane kisikove plazme, ki smo jo vzbujali z radiofrekvenčnim generatorjem. Generator deluje pri industrijski frekvenci 13,56 MHz in izhodni moči 1000 W. Grafitne vzorce, narezane na kose z merami 10 mm x 10 mm * (\"1,7) mm v višino in jih obdelovali s plazmo v različnem času do 90 s. Morfologijo prvotno povsem ravnih vzorcev smo opazovali z vrstičnim elektronskim mikroskopom visoke ločljivosti. Opazili smo, da plazemska obdelava vodi k nehomogenemu jedkanju. Sprva se na površini grafita tvorijo kroglasti skupki dimenzije pod 1 m, ki kaj kmalu prerastejo v stožce. Velikost stožcev narašča s časom plazemske obdelave do okoli 40 s, z nadaljnjoobdelavo pa postopoma izginjajo. Po dolgem času obdelave stožci povsem izginejo, namesto njih pa nastanejo okrogle vdolbine. Pri krajših časihobdelave smo opazili tudi nepravilno orientirane kanale. Na mestih, kjer so se nahajali prašni drobci, smo opazili tudi večje stožce dimenzije več mikrometrov. Opažene pojave smo razložili z interakcijo visoko vzbujenih kisikovih delcev s površinskimi atomi ogljika"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-XWXN9NP5","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-XWXN9NP5"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XWXN9NP5/03046274-8019-4f54-86fd-ea9eef3f27c2/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-XWXN9NP5/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-XWXN9NP5"}}}}