{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XKXMSKBM/97f0f808-3155-4543-83f6-215b50fbc66c/HTML","dcterms:extent":"17 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XKXMSKBM/6da87f63-f019-40e9-b819-f3b0110b5f92/PDF","dcterms:extent":"167 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XKXMSKBM/e9bc287f-50c6-40ed-a8c3-fad0389f9db0/TEXT","dcterms:extent":"17 KB"}],"edm:TimeSpan":{"@rdf:about":"2000-2026","edm:begin":{"@xml:lang":"en","#text":"2000"},"edm:end":{"@xml:lang":"en","#text":"2026"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-XKXMSKBM","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/urn:nbn:si:spr-ihg6vo21"},{"@xml:lang":"sl","#text":"Materiali in tehnologije"}],"dcterms:issued":"2000","dc:creator":["Budnar, Miloš","Pelicon, Primož","Razpet, Alenka","Zorko, Benjamin"],"dc:format":[{"@xml:lang":"sl","#text":"številka:3/4"},{"@xml:lang":"sl","#text":"letnik:34"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"str. 161-164"}],"dc:identifier":["ISSN:1580-2949","COBISSID:222378","URN:URN:NBN:SI:doc-XKXMSKBM"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"dc:subject":[{"@xml:lang":"sl","#text":"analizne metode"},{"@xml:lang":"sl","#text":"karakterizacija"},{"@xml:lang":"sl","#text":"spektroskopija"},{"@xml:lang":"sl","#text":"tanke plasti"},{"@rdf:resource":"http://www.wikidata.org/entity/Q483666"}],"dcterms:temporal":{"@rdf:resource":"2000-2026"},"dc:title":{"@xml:lang":"sl","#text":"Karakterizacija tankih plasti in površin s hitrimi ioni| Characterization of thin films and surfaces with ion-beam analytical techniques|"},"dc:description":[{"@xml:lang":"sl","#text":"The optimization of Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) at the tandetron facility of J. Stefan Institute is reported. RBS was applied to determine nitrogen depth concentration profiles in the ?$TaN_x$? thin layers. Hydrogen depth concentration profiles were measured in the chemically treated surfaces of lithium niobate by means of ERDA. The construction of the mass-resolved Time-Of-Flight ERDA telescope for depth concentration profiling of light elements is reviewed"},{"@xml:lang":"sl","#text":"Predstavljamo uporabo analitskih tehnik s hitrimi ioni pri analizi tankih plasti in površin. Z metodo Rutherfordovega sipanja (RBS) smo določali dušikove globinske koncentracijske profile v tankih plasteh ?$TaN_x$?. S spektroskopijo elastično odrinjenih ionov (ERDA) smo izmerili koncentracijske globinske profile vodika v kemijsko obdelanih površinah ?$LiNbO_4$?. Opisujemo lastnosti in potek gradnje spektrometra za ERDA z merjenjem časa preleta, s katerim bomo določali globinske koncentracijske profile lahkih elementov"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-XKXMSKBM","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-XKXMSKBM"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-XKXMSKBM/6da87f63-f019-40e9-b819-f3b0110b5f92/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-XKXMSKBM/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-XKXMSKBM"}}}}