17 KB167 KB17 KB200020262000Budnar, MilošPelicon, PrimožRazpet, AlenkaZorko, Benjaminštevilka:3/4letnik:344 stranistr. 161-164ISSN:1580-2949COBISSID:222378URN:URN:NBN:SI:doc-XKXMSKBMslInštitut za kovinske materiale in tehnologijeMateriali in tehnologijeanalizne metodekarakterizacijaspektroskopijatanke plastiKarakterizacija tankih plasti in površin s hitrimi ioni| Characterization of thin films and surfaces with ion-beam analytical techniques|The optimization of Rutherford Backscattering Spectroscopy (RBS) and Elastic Recoil Detection Analysis (ERDA) at the tandetron facility of J. Stefan Institute is reported. RBS was applied to determine nitrogen depth concentration profiles in the ?$TaN_x$? thin layers. Hydrogen depth concentration profiles were measured in the chemically treated surfaces of lithium niobate by means of ERDA. The construction of the mass-resolved Time-Of-Flight ERDA telescope for depth concentration profiling of light elements is reviewedPredstavljamo uporabo analitskih tehnik s hitrimi ioni pri analizi tankih plasti in površin. Z metodo Rutherfordovega sipanja (RBS) smo določali dušikove globinske koncentracijske profile v tankih plasteh ?$TaN_x$?. S spektroskopijo elastično odrinjenih ionov (ERDA) smo izmerili koncentracijske globinske profile vodika v kemijsko obdelanih površinah ?$LiNbO_4$?. Opisujemo lastnosti in potek gradnje spektrometra za ERDA z merjenjem časa preleta, s katerim bomo določali globinske koncentracijske profile lahkih elementovTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije