{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-X8U3FPKN/bd248d20-27be-4283-9ab0-a24a44c25300/HTML","dcterms:extent":"14 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-X8U3FPKN/c31ccf8d-93ad-4170-82f6-9bf9c2b3f8c5/PDF","dcterms:extent":"118 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-X8U3FPKN/3be0f1f1-54cd-42fd-9598-949f4dfb97b7/TEXT","dcterms:extent":"13 KB"}],"edm:TimeSpan":{"@rdf:about":"2000-2024","edm:begin":{"@xml:lang":"en","#text":"2000"},"edm:end":{"@xml:lang":"en","#text":"2024"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-X8U3FPKN","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/urn:nbn:si:spr-ihg6vo21"},{"@xml:lang":"sl","#text":"Materiali in tehnologije"}],"dcterms:issued":"2002","dc:creator":["Babič, Dušan","Cvelbar, Uroš","Mozetič, Miran","Poberaj, Igor"],"dc:format":[{"@xml:lang":"sl","#text":"3 strani"},{"@xml:lang":"sl","#text":"letnik:36"},{"@xml:lang":"sl","#text":"številka:5"},{"@xml:lang":"sl","#text":"str. 243-245"}],"dc:identifier":["COBISSID:1537380","ISSN:1580-2949","URN:URN:NBN:SI:doc-X8U3FPKN"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"dc:subject":[{"@xml:lang":"sl","#text":"atomi"},{"@xml:lang":"sl","#text":"kisik"},{"@xml:lang":"sl","#text":"merjenje"},{"@xml:lang":"sl","#text":"plazma"},{"@xml:lang":"sl","#text":"rekombinacija"},{"@xml:lang":"sl","#text":"sonda"},{"@xml:lang":"sl","#text":"vakuum"},{"@rdf:resource":"http://www.wikidata.org/entity/Q629"}],"dcterms:temporal":{"@rdf:resource":"2000-2024"},"dc:title":{"@xml:lang":"sl","#text":"Meritve gostote atomarnega kisika z optično katalitično sondo| Measurements of atomic oxygen density with fiber optics catalytic probe|"},"dc:description":[{"@xml:lang":"sl","#text":"The main reactant in the technological processes of selective plasma etching, discharge cleaning, plasma activation of polymer and composite materials, and cold ashing is atomioc oxygen. It is generated at inelastic collisions between electrons and molecules in oxygen plasma. The density of neutral oxygen atoms is therefore the most important plasma parameter. Different techniques are used for determination of this parameter, including the optical spectroscopy, mass spectrometry, NO titration and catalytic probes. An optical catalytic probe developed recently at our laboraatories is described. We used the probe for measurement of density of oxygen atoms in a plasma reactor. We found out that it increases fairly linearly with increasing pressure in the range between 30 and 80 Pa. By changing the position of a recombinator in the reactor we measured the density of oxygen atoms as a function of the distance between the recombinator tip and the probe. We found out that the density of oxygen atoms in the vicinity of the probe remained constant as long as the distance was more than 10 cm. At shorter distance, however, the density rapidly decreased with decreasing distance"},{"@xml:lang":"sl","#text":"Pri tehnoloških postopkih selektivnega plazemskega jedkanja, plazemskega čiščenja, plazemske aktivacije površin polimernih in kompozitnih materialov ter hladnega upepeljevanja je glavni reaktant atomarni kisik, ki nastaja pri neprožnih trkih elektronov z molekulami v kisikovi plazmi. Gostota atomov kisika je zato pri omenjenih tehnologijah najpomembnejši parameter plazme. Za merjenje tega parametra lahko uporabimo optično spektroskopijo, masno spektrometrijo, NO titracijo in katalitične sonde. Predstavljamo optično katalitično sondo, ki smo jo razvili v naših laboratorijih. Z njo smo merili gostoto atomov kisika v plazemskem reaktorju. Ugotovili smo, da v tlačnem območju med 30 in 80 Pa gostota atomov približno linearno narašča z naraščajočim tlakom. S spreminjanjem položaja rekombinatorja v reaktorju smo izmerili gostoto ataomov kisika v odvisnosti od razdalje med konico rekombinatorja in sondo. Ugotovili smo, da je gostota atomov kisika v neposredni okolici sonde neodvisna od položaja rekombinatorja, dokler je le-ta večja od 10 cm. Pri krajših razdaljah pa gostota atomov kisika s približevanjem rekombinatorja sondi nagalo pada"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-X8U3FPKN","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-X8U3FPKN"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-X8U3FPKN/c31ccf8d-93ad-4170-82f6-9bf9c2b3f8c5/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-X8U3FPKN/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-X8U3FPKN"}}}}