{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-WMLPB6N8/0134d7f3-475a-4601-b2c1-193939a1bce5/HTML","dcterms:extent":"30 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-WMLPB6N8/049db451-5aed-49f9-a178-3b2bd5cf157c/PDF","dcterms:extent":"192 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-WMLPB6N8/f4719a61-58d7-49a8-9e73-f200fe2dd6e9/TEXT","dcterms:extent":"30 KB"}],"edm:TimeSpan":{"@rdf:about":"2000-2026","edm:begin":{"@xml:lang":"en","#text":"2000"},"edm:end":{"@xml:lang":"en","#text":"2026"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-WMLPB6N8","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/urn:nbn:si:spr-ihg6vo21"},{"@xml:lang":"sl","#text":"Materiali in tehnologije"}],"dcterms:issued":"2001","dc:creator":["Erjavec, Bojan","Irmančnik-Belič, Lidija","Šetina, Janez"],"dc:format":[{"@xml:lang":"sl","#text":"letnik:35"},{"@xml:lang":"sl","#text":"številka:5"},{"@xml:lang":"sl","#text":"7 strani"},{"@xml:lang":"sl","#text":"str. 251-257"}],"dc:identifier":["ISSN:1580-2949","COBISSID:285023","URN:URN:NBN:SI:doc-WMLPB6N8"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"dc:subject":[{"@xml:lang":"sl","#text":"električna poljska jakost"},{"@xml:lang":"sl","#text":"jakost"},{"@xml:lang":"sl","#text":"magnetronska celica"},{"@xml:lang":"sl","#text":"nelinearnost"},{"@xml:lang":"sl","#text":"nezveznost"},{"@xml:lang":"sl","#text":"potencialna porazdelitev"},{"@xml:lang":"sl","#text":"razelektritev"},{"@rdf:resource":"http://www.wikidata.org/entity/Q185329"}],"dcterms:temporal":{"@rdf:resource":"2000-2026"},"dc:title":{"@xml:lang":"sl","#text":"Karakteristike magnetronskega ionizacijskega merilnika s hladno katodo v visokovakuumskem (VV) in ultra visokovakuumskem (UVV) področju| Characteristics of a magnetron cold-cathode ionization gauge in the high- vacuum (HV) and ultra high- vacuum (UHV) ranges|"},"dc:description":[{"@xml:lang":"sl","#text":"A model magnetron gauge was constructed based on the small-size 2 l/s sputter-ion Varian-type pump with additional changes, such as: copper cathode plates, a stainless-steel cathode rod, an electrically insulated housing, a highly electrically insulated high-voltage feed-through and a low stray-field Sm-Co magnet. The last three changes enabled accurate measurements of discharge currents from 0,1 nA to 20 ?$\\mu$?A. The magnetron cell characteristics were measured against a reference extractor gauge on a UHV gauge comparison system. Nitrogen, hydrogen, argon and helium were selected as the test gases. First, the discharge intensity was measured vs anode voltage in the 10 kV range at different pressures selected in the range from 1x10$^-9$ to 1x10$^-6$ mbar. The discharge intensitz behaviour was similar for all test gases. A maximum discharge intensity which was measured at the higher pressure is hifted towards the higher anode voltage. Then the measuring of discharge current vs nitrogen pressure in UHV and HV at different operating voltages selected in the range from 2,5 to 4,5 kV was followed. An optimum discharge current vs pressure characteristic was measured at an operating voltage of 3,5 kV. It can be approximated, using a power law, with an exponent n = 1,38. A magnetron cell pumping speed in HV was also determined at different operating voltages by measuring the equilibrium nitrogen pressure using a spinning rotor gauge and an equilibrium nitrogen flow rate using the rate of pressure-rise method. At a nitrogen pressure of 1x10$^-6$ mbar and an operating voltage of 3,5 kV, the magnetron-cell sensitivity and pumping speed are 9,3 A/mbar and 0,6 l/s, respectively"},{"@xml:lang":"sl","#text":"Model merilne glave z navadno magnetronsko geometrijo je bil konstruiran na osnovi standardne miniaturne ionsko-razprševalne črpalke z dodatnimi spremembami, kot so: bakreni katodni plošči, katodna palica iz nerjavnega jekla, električno izolirano ohišje, visokonapetostna prevodnica z veliko električno prebojno trdnostjo in oklopljen magnet iz zlitine Sm-Co. Zadnje tri spremembe so omogočile natančne meritve razelektritvenih tokov od 0,1 nA do ?$\\mu$?A. Karakteristike magnetonske celice so bile izmerjene z referenčnim ekstraktorskim merilnikom na UVV kalibracijskem sistemu za primerjavo merilnikov. Za preskusne pline smo izbrali dušik, vodik, argon in helij. Najprej smo izmerili jakost razelektritve v odvisnosti od anodne napetosti znotraj področja 10 kV pri različnih tlakih, izbranih v območju od 1x10$^-9$ do 1x10$^-6$ mbar. Potek jakosti razelektritve je približno enak za vse preskusne pline. Maksimum jakosti razelektritve, ki je izmerjen pri višjem tlaku, je pomaknjen k višji anodni napetosti. Nato smo izmerili razelektritveni tok v odvisnosti od tlaka dušika v UVV in VV področju pri različnih delovnih napetostih, izbranih v območju od 2,5 do 4,5 kV. Optimalna karakteristika razelektritvenega toka v odvisnosti od tlaka je bila izmerjena pri delovni napetosti 3,5 kV in se lahko aproksimira s potenčno funkcijo z eksponentom n = 1,28. V VV področju je bila pri različnih delovnih napetostih ugotovljena tudi črpalna hitrost magnetonske celice z merjenjem ravnotežnega tlaka dušika, kjer smo uporabili viskoznostni merilnik z lebdečo kroglico, in ravnotežnega pretoka dušika z metodo hitrosti naraščanja tlaka. Pri tlaku dušika 1x10$^-6$ mbar in delovni napetosti 3,5 kV je občutljivost magnetonske celice 9,3 A/mbar in ustrezna črpalna hitrost 0,6 l/s"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-WMLPB6N8","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-WMLPB6N8"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-WMLPB6N8/049db451-5aed-49f9-a178-3b2bd5cf157c/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-WMLPB6N8/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-WMLPB6N8"}}}}