Theoretical analysis of stiffness constant and effective mass for a round-folded beam in MEMS accelerometer

URN:NBN:SI:DOC-S7KVXPSW2011Azid, Ishak AbdulMajlis, Burhanuddin YeopWong, Wai Chidocuments/doc/S/URN_NBN_SI_doc-S7KVXPSW_001.htmdocuments/doc/S/URN_NBN_SI_doc-S7KVXPSW_001.pdfdocuments/doc/S/URN_NBN_SI_doc-S7KVXPSW_001.txt576articlestr. 517-5250039-2480262748416URN:NBN:SI:doc-S7KVXPSWengAssociation of Mechanical Engineers and Technicians of Slovenia et al.Zveza strojnih inženirjev in tehnikov Slovenije et al.Strojniški vestnikInCdeformacijska energijaefektivna masapospeškomer MEMSupognjeni nosilcivzmetna konstantaTheoretical analysis of stiffness constant and effective mass for a round-folded beam in MEMS accelerometer