14 KB117 KB12 KB200020262002Mozetič, MiranVesel, Alenka3 straniletnik:36številka:5str. 285-287ISSN:1580-2949COBISSID:69346URN:URN:NBN:SI:doc-RB1CURKMslInštitut za kovinske materiale in tehnologijeMateriali in tehnologijeelektrične lastnostimagnetronska celicavisoki vakuumKarakteristike magnetronske celice v področju UVV| Characteristics of a magnetron cell in the ultra-high vacuum region|The characteristics of a magnetron cell in the pressure range between 5.10sup-9 and 1.10sup-6 mbar were measured. The magnetron cell was made of a stainless-steel housing and a titanium cathode. The length of the cell was 35 mm and the diameter was 25 mm. A bridge electrode with a diameter of 6 mm was placed between the cathode plates. The discharge current was measured systematically at different voltages and magnetic field. It was found that in general the current at first slowly increased with increasing voltage, reached a maximum at a certain voltage and decreased rapidly with a further increase of voltage. At the pressure of 1.10sup-8 mbar, the maximum current of 0.12 muA was reached at the voltage of 6 kV and magnetic field of 0.13 T. The voltage, at which the ion current reached the maximum depended on the magnetic field density and the pressure. At low magnetic field the peak current was obtained at relatively low voltage. The same applied for the pressure. In any case the discharge expressed good stability in a wide range of pressure between 5.10sup-9 and 1.10sup-6 mbar, voltage between 1 and 8 kV and magnetic field density between 0.1 and 0.2 TMerili smo karakteristike magnetronske celice v tlačnem območju med 5.10na-9 in 1.10na-6 mbar. Celica je bila narejena iz ohišja iz nerjavnega jekla, v katerem je bila vgrajena titanaova katodna palica debeline 6 mm. Dolžina celice je bila 35 mm, premer pa 25 mm. Ionski tok v celici smo merili sistematično pri različnih napetostih in jakostih magnetnega polja. Ugotovili smo, da tok v celici v splošnem narašča z naraščajočo napetostjo, doseže maksimum, nato pa pade z nadaljnjim naraščanjem napetosti. Pri tlaku 1.10na-8 mbar smo dosegli maksimalni tok okoli 0,05 miA pri napetosti 4,7 kV in magnetnem polju 0,13 T. Napetost, pri kateri tok doseže maksimum, je odvisna od jakosti magnetnega polja in tlaka. Pri majhnih magnetnih poljih doseže tok maksimum pri razmeroma nizki napetosti. Podobno velja tudi za tlak. Vsekakor je bila razelektritev stabilna v širokem območju tlakov med 5.10na-9 in 1.10na-6 mbar, napetosti med 1 in 8 kV in jakosti maganetnega polja med 0,1 in 0,2 TTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije