{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-M6ZZQQA3/91e1386a-8e8d-4646-a65a-2412388660b8/HTML","dcterms:extent":"38 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-M6ZZQQA3/e19cd2e5-ddcd-4e84-83ec-14aea4e23842/PDF","dcterms:extent":"240 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-M6ZZQQA3/b53ba339-bd2b-42db-adb5-65a1921a38d0/TEXT","dcterms:extent":"37 KB"}],"edm:TimeSpan":{"@rdf:about":"2000-2026","edm:begin":{"@xml:lang":"en","#text":"2000"},"edm:end":{"@xml:lang":"en","#text":"2026"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-M6ZZQQA3","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/urn:nbn:si:spr-ihg6vo21"},{"@xml:lang":"sl","#text":"Materiali in tehnologije"}],"dcterms:issued":"2001","dc:creator":["Erjavec, Bojan","Irmančnik-Belič, Lidija","Šetina, Janez"],"dc:format":[{"@xml:lang":"sl","#text":"številka:3/4"},{"@xml:lang":"sl","#text":"letnik:35"},{"@xml:lang":"sl","#text":"8 strani"},{"@xml:lang":"sl","#text":"str. 143-150"}],"dc:identifier":["ISSN:1580-2949","COBISSID:280415","URN:URN:NBN:SI:doc-M6ZZQQA3"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"dc:subject":[{"@xml:lang":"sl","#text":"ionizacijski merilniki"},{"@xml:lang":"sl","#text":"nelinearnost"},{"@xml:lang":"sl","#text":"nezveznost"},{"@xml:lang":"sl","#text":"razelektritev"},{"@xml:lang":"sl","#text":"visoki vakuum"}],"dcterms:temporal":{"@rdf:resource":"2000-2026"},"dc:title":{"@xml:lang":"sl","#text":"Primerjava karakteristik ionizacijskih merilnikov s hladno katodo v ultra visokovakuumskem področju| Comparison of cold-cathode ionization gauge characteristics in ultrahigh vacuum range|"},"dc:description":[{"@xml:lang":"sl","#text":"Cold-cathode ionization gauges are convenient for pressure measurements in the ultrahigh vacuum range due to negligible outgassing and low measuring limit. Disadvantages such as non-linearity in discharge current vs pressure, discontinuities and starting delay can affect the accuracy of pressure measurements in UHV. Models of Penning, normal magnetron and inverted magnetron gauges have been constructed based on the small-size 2 l/s sputter-ion pump of Varian type with a housing electrically insulated from the connecting flange, a highly electrically insulated high-voltage feedthrough and a low stray field Sm-Co magnet. These additional changes enabled accurate measurements of low discharge currents. Gauge characteristics were measured on a gauge comparison UHV calibration system comprising a test chamber, equipped with an extractor gauge and a spinning gauge, and a gas manifold with a precise leak valve. Discharge intensity depends on the magnetic field density, discharge cell dimensions, operating voltage and test gas pressure. The magnetic field density was kept constant since the standard magnets were applied. The discharge cell dimensions were approximately the same for all gauge types. Discharge intensity was measured, first vs anode voltage at different pressures ranging from UHV to HV, and then after vs pressure at the selected operating voltage. Nitrogen and hydrogen were selected as a test gas. A special attention was paid to the measurements of gauge characteristics when using hydrogen due to its low ionization efficiency. The selection of an optimal operation voltage is important in the UHV range since in baked UHV system the residual atmosphere consists mainly of hydrogen. Typical cases of a non-optimally selected operating voltage for all gauge types, reflecting in inflection points and obvious discontinuities at discharge current vs pressure characteristics, are presented in this paper"},{"@xml:lang":"sl","#text":"Ionizacijski merilniki s hladno katodo so zaradi zanemarljivega razplinjevanja in nizke spodnje merilne meje primerni za merjenje tlaka v ultra visokovakuumskem področju. Nelinearnost in nezveznost razelektritvenega toka v odvisnosti od tlaka ter časovno zakasnjen vžig razelektritve lahko vplivajo na zanesljivost merjenja tlaka v UVV. Modeli merilnih glav s Penningovo, normalno magnetronsko in invertno magnetronsko geometrijo so bili konstruirani na osnovi miniaturne ionsko-razprševalne črpalke, pri kateri je ohišje električno izolirano od priključne prirobnice in je uporabljena visokonapetostna prevodnica z veliko električno prebojno trdnostjo. Ohišje obdaja oklopljen magnet iz Sm-Co. Te dodatne spremembe so omogočale natančne meritve zelo majhnih razelektritvenih tokov. Karakteristike merilnikov so bile izmerjene na kalibracijskem UVV sistemu za primerjalne meritve, ki vsebuje preskusno komoro, opremljeno z ekstraktorskim merilnikom in viskoznostnim merilnikom z lebdečo kroglico, in plinski uvajalni sistem s preciznim dozirnim ventilom. Jakost razelektritve je odvisna od gostote magnetnega polja, dimenzij razelektritvene celice, delovne napetosti in tlaka izbranega plina. Gostota magnetnega polja je bila konstantna zaradi uporabe standardnih magnetov. Pri vseh treh geometrijah so bile približno enake dimenzije razelektritvene celice. Jakost razelektritve je bila izmerjena najprej v odvisnosti od delovne napetosti pri različnih tlakih v UVV in VV, nato pa v odvisnosti od tlaka pri izbrani delovni napetosti. Za preskusni plinsta bila izbrana dušik in vodik. Meritve karakteristik v primeru vodika so bile deležne posebne pozornosti zaradi nizke vodikove ionizacijske zmogljivosti. Izbira optimalne delovne napetosti je pomembna v UVV področju, saj v pregretih kovinskih UVV sistemih rezidualno atmosfero sestavlja pretežno vodik. V članku so prikazani značilni primeri neoptimalno izbrane delovne napetosti za vse tri geometrije, ki se pri karakteristiki razelektritveni tok v odvisnosti od tlaka vodika izražajo v infleksijskih in prevojnih točkah ter očitnih diskontinuitetah"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-M6ZZQQA3","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-M6ZZQQA3"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-M6ZZQQA3/e19cd2e5-ddcd-4e84-83ec-14aea4e23842/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-M6ZZQQA3/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-M6ZZQQA3"}}}}