URN:NBN:SI:DOC-IARQGFIA2015Calleja, WilfridoCastano, Víctor M.De la Hidalga Wade, Francisco JavierGalindo, MargaritaLópez, FranciscoPalomino-Merino, RodolfoZúniga, Carlosdocuments/doc/I/URN_NBN_SI_doc-IARQGFIA_001.pdfdocuments/doc/I/URN_NBN_SI_doc-IARQGFIA_001.txt149articlestr. 3-811301541580-2949URN:NBN:SI:doc-IARQGFIAengInštitut za kovinske materiale in tehnologijeMateriali in tehnologijeInCamorfni silicijamorfni silicij-germanijamorphous silicondiamantna strukturadiamond-type structuremicro-electro-mechanical systemsmicromachining technologymikroelektromehanski sistemiPECVDtanke plastiVernier beamVernierjev steberBoron-doped hydrogenated amorphous semiconductor MEMSZ borom dopirani hidrogenirani amorfni polprevodnik MEMS