{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-HPZ4C720/ad274717-10cf-4181-9468-a8f77f7f4b3f/HTML","dcterms:extent":"14 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-HPZ4C720/e6713c33-0ed8-45c4-87da-80703fcad50d/PDF","dcterms:extent":"179 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-HPZ4C720/7e3d3a06-eb39-4eb5-94e2-37987c2c4394/TEXT","dcterms:extent":"13 KB"}],"edm:TimeSpan":{"@rdf:about":"1992-1999","edm:begin":{"@xml:lang":"en","#text":"1992"},"edm:end":{"@xml:lang":"en","#text":"1999"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-HPZ4C720","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-QKUCN2BD"},{"@xml:lang":"sl","#text":"Kovine zlitine tehnologije"}],"dcterms:issued":"1999","dc:creator":["Mozetič, Miran","Praček, Borut","Pregelj, Andrej","Zorko, Benjamin"],"dc:format":[{"@xml:lang":"sl","#text":"številka:1/2"},{"@xml:lang":"sl","#text":"letnik:33"},{"@xml:lang":"sl","#text":"str. 161-163"}],"dc:identifier":["ISSN:1318-0010","COBISSID:142762","URN:URN:NBN:SI:doc-HPZ4C720"],"dc:language":"sl","dc:publisher":[{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},{"@xml:lang":"sl","#text":"Železarna Jesenice"},{"@xml:lang":"sl","#text":"Železarna Ravne"},{"@xml:lang":"sl","#text":"Železarna Štore"}],"dc:subject":[{"@xml:lang":"sl","#text":"ionske črpalke"},{"@xml:lang":"sl","#text":"površine"},{"@xml:lang":"en","#text":"titan"},{"@xml:lang":"sl","#text":"vakuumske črpalke"},{"@rdf:resource":"http://www.wikidata.org/entity/Q102282"}],"dcterms:temporal":{"@rdf:resource":"1992-1999"},"dc:title":{"@xml:lang":"sl","#text":"Preiskave površine katod iz ionske črpalke| Investigation of the surface of an ion pump cathode|"},"dc:description":[{"@xml:lang":"sl","#text":"Pumping of hydrogen in sputter ion pumps is mainly due to dissociate adsorption of molecules on pure titanium surface and diffusion of atoms in the bulk cathode plates. The area on the surface, which is exposed to extensive sputtering is always clean and represent a sink for hydrogen. The biggest area of cathode plates of classical ion pumps is subjected to weak ion bombardment and may be contaminated with a thin film of titanium compounds during improper use with the pump. The layer prevents dissociation of hydrogen molecules and diffusion of atoms in the bulk. The composition of the surface layer of titanium cathodes of a triode pump was determined. We found out that a layer of impurities with the thickness of about 0.5 ?$\\mu$?m composed mainly of titanium, carbon, nitrogen and oxygen was formed on the surface. Since the sputtering coefficient for titanium carbide, nitride and oxide is much smaller than for pure titanium, the layer of impurities cannot be removed with the standard regeneration procedure"},{"@xml:lang":"sl","#text":"Črpanje vodika v naprševalni ionski črpalki poteka predvsem po disociativni adsorpciji molekul na čistih površinah titana in difuziji atomov v notranjost katodnih plošč. Površina dela titanovih katod, ki je izpostavljena izdatnemu odprševanju, je vselej čista in je dober ponor za vodik. Večji del površin katod klasičnih ionsko naprševalnih črpalk pa je izpostavljen le šibkemu bombardiranju z ioni, zato se lahko pri nepravilnem ravnanju s črpalko na teh površinah katod formira tanka plast titanovih spojin, ki preprečuje disociacijo molekul vodika in difuzijo v notranjost. Preiskovali smo sestavo površinske plasti na titanovih katodah v triodni črpalki, ki je obratovala pri različnih pogojih. Ugotovili smo, da je na površini katode te črpalke prisotna plast nečistoč debeline okoli 0,5 ?$\\mu$?m, ki je sestavljena pretežno iz titana, ogljika, dušika in kisika. Koeficient razprševanja za titanove karbide, nitride in okside je precej nižji kot za čisti titan, zato omenjene plasti ne moremo odstraniti s klasičnim postopkom regeneracije črpalke"},{"@xml:lang":"sl","#text":"Nadaljuje se kot: Materiali in tehnologije"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-HPZ4C720","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-HPZ4C720"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-HPZ4C720/e6713c33-0ed8-45c4-87da-80703fcad50d/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-HPZ4C720/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-HPZ4C720"}}}}