{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-GSQVDMTL/6535ab57-245f-41e6-8f38-f48c8af0de7c/HTML","dcterms:extent":"19 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-GSQVDMTL/b37f9448-fc21-4df4-a26b-4aad4a09fc88/PDF","dcterms:extent":"161 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-GSQVDMTL/dbf040dc-5d77-4cad-941a-29c1d61bc220/TEXT","dcterms:extent":"18 KB"}],"edm:TimeSpan":{"@rdf:about":"1992-1999","edm:begin":{"@xml:lang":"en","#text":"1992"},"edm:end":{"@xml:lang":"en","#text":"1999"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-GSQVDMTL","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-QKUCN2BD"},{"@xml:lang":"sl","#text":"Kovine zlitine tehnologije"}],"dcterms:issued":"1999","dc:creator":["Mišina, Martin","Musil, Jindřich","Regent, Filip","Shaginyan, Leonid R."],"dc:format":[{"@xml:lang":"sl","#text":"letnik:33"},{"@xml:lang":"sl","#text":"4 strani"},{"@xml:lang":"sl","#text":"številka:6"},{"@xml:lang":"sl","#text":"str. 497-500"}],"dc:identifier":["ISSN:1318-0010","COBISSID:205738","URN:URN:NBN:SI:doc-GSQVDMTL"],"dc:language":"en","dc:publisher":[{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},{"@xml:lang":"sl","#text":"Železarna Jesenice"},{"@xml:lang":"sl","#text":"Železarna Ravne"},{"@xml:lang":"sl","#text":"Železarna Štore"}],"dc:subject":[{"@xml:lang":"sl","#text":"kovinske prevleke"},{"@xml:lang":"sl","#text":"mikrostruktura"},{"@xml:lang":"sl","#text":"naprševanje"},{"@xml:lang":"sl","#text":"nitridi"},{"@xml:lang":"en","#text":"titan"},{"@xml:lang":"sl","#text":"trdota"},{"@xml:lang":"sl","#text":"volfram"},{"@rdf:resource":"http://www.wikidata.org/entity/Q743"}],"dcterms:temporal":{"@rdf:resource":"1992-1999"},"dc:title":{"@xml:lang":"sl","#text":"Characterization of hard Ti-W-N films deposited by reactive d.c. magnetron sputtering| Karakterizacija trdih TiWN plasti deponiranih z reaktivnim dc magnetronskim naprševanjem|"},"dc:description":[{"@xml:lang":"sl","#text":"Ti-W-N films were deposited by reactive d.c. magnetron sputtering from a W-Ti (30 at.%) target in a mixture of argon and nitrogen onto steel and silicon substrates. The substrates were placed at a distance of 50mm from the target. The total pressure prior to the ignition of the discharge was kept at 0.5 Pa, while the total gas flow was set to 50 sccm. The typical deposition parameters were: substrate temperature 320°C, deposition rate 3 nm/s, film thickness 3.5 ?$\\mu$?m, substrate bias -100 V, and mean substrate ion current density 1.2 mA/?$cm^2$?. The crystal structure, composition and micro-hardness were studied as a function of deposition parameters, i.e., nitrogen content in the working gas mixture, substrate ion current density and substrate bias. The films containing less than 30 at.% nitrogen were composed of bcc W and, possibly hcp Ti phases. The hardness of these films increased with increasing nitrogen content from 25 GPa for o at.% N up to a maximum of approximately 60 GPa for 25 at.% N. This was accompanied by increasing micraostrain, as revealed by an analysis of the broadening of the X-ray reflections. The films with a nitrogen content over 30 at.% were characterized by a micro-hardnessof about 40 GPa and by X-ray reflections indicative of an fcc phase"},{"@xml:lang":"sl","#text":"TiWN plasti so bile deponirane z reaktivnim magnetronskim naprševanjem iz W-Ti (30 at.%) tarče v atmosferi iz dušika in argona na substrate iz jekla in silicija na oddaljenosti 50 nm od tarče. Skupni pritisk pred začetkom naprševanja je bil 0.5 Pa, pretok plina pa 50 sccm. Značilni parametri depozicije so bili: temperatura substrata 320°C, hitrost depozicije 3 mm/s, debelina plasti 3.5 ?$\\mu$?m, bias substrata -100 V in poprečni ionski tok substrata 1.2 mA/?$cm^2$?. Kristalna struktura, sestava in mikrotrdota so bile določene v odvisnosti od parametrov depozicije: vsebnost dušika v atmosferi ter gostote ionskega toka in biasa substrata. Plasti z manj od 30 at.% dušika so bile sestavljene iz bbc W in hcp Ti faz. Trdota teh plasti je rastla z vsebnostjo dušika od 25 GPa za 0% do maksimuma 60 GPa pri 25 at.% N. Povečanje trdote je rastlo z mikrodeformacijami, ki so se pokazale s širjenjem uklona X žarkov. Plasti z nad 30 at.% N so imele trdoto okoli 40 GPa, uklon X žarkov pa je bil značilen za neko fcc fazo"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-GSQVDMTL","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-GSQVDMTL"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-GSQVDMTL/b37f9448-fc21-4df4-a26b-4aad4a09fc88/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-GSQVDMTL/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-GSQVDMTL"}}}}