22 KB337 KB20 KB200020242008Godec, MatjažGrant, John T.Jenko, MonikaLeskovšek, VojtehMandrino, Djordjeletnik:42številka:6str. 251-255ISSN:1580-2949COBISSID:699562URN:URN:NBN:SI:doc-E2H6P5Q2enInštitut za kovinske materiale in tehnologijeMateriali in tehnologijeAugerjeva elektronska spektroskopijaboridinitridipreiskava materialatitantrde prevlekevalovno disperzijska spektroskopijaCharacterization of multilayer PACVD TiN/Ti(B-N)/TiB2 coatings for hot-worked tool steels using electron spectroscopy techniques| Karakterizacija večplastne PACVD TiN/Ti(B-N)/TiB2 prevleke za orodna jekla za delo v vročem s tehnikami elektronske spektroskopije|Multilayer Ti(B-N) layers have been sandwiched between a TiN coating on treated AISI H11 steel and an outermost TiBsub2 coating. The films were deposited with plasma-assisted chemical vapour deposition (PACVD) and have been characterized using electron spectroscopy techniques. The thickness of the total coating is 1.6 mum and comprised 21 layers. Earlier studies of such coatings using X-ray diffraction (XRD), energy dispersive spectroscopy (EDS), and wavelength dispersive spectroscopy (WDS) suffer from their relatively large analysis depths. In this work, Field-emission Auger electron spectroscopy (FE-AES) was used to examine the composition of the multilayered films since it has a smaller analysis depth. AES line-scans across cross-sectioned samples and AES depth profiling were used and are shown to be well suited for characterizing these multilayered coatings. These results are compared with combined Field-emission scanning electron microscopy (FE-SEM) and wavelength dispersive spectroscopy (WDS) measurements of the cross-sectioned samplesVečplastne Ti(B-N) plasti so vrinjene med TiN prevleko jekla AISI H11 in zunanjo TiBspodaj2 plast. Plasti so bile nanesene po postopku kemijske parne faze ob pomoči plazme (PZACVD), raziskali smo jih z različnimi tehnikami osnovanimi na elektronski spektroskopiji. Debelina celotne prevleke iz 21 plasti je 1,6 mim. Prejšnje raziskave tovrstnih prevlek z rentgensko difrakcijo (XRD), energijsko disperzijsko spektroskopijo (EDS), valovno disperzijsko spektroskopijo (WDS) niso dovolj natančne zaradi relativno velike analizne globine. V članku predstavljamo uporabo Augerjeve elektronske spektroskopije s FEG izvorom elektronov (FE-AES) za raziskavo sestave posameznih plasti v večplastni prevleki. AES linijska analiza preko preseka vzorca in AES globinski profil se je pokazala za zelo primerno za karakterizacijo tovrstnih večplastnih prevlek. Rezultate smo primerjali z meritvami z vrstično elektronsko mikroskopijo s FEG izvorom elektronov (FE-SEM) in valovno disperzijsko spektroskopijo (WDS) na prečno prerezanih vzorcihTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije