{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-DXAI3O26/0827b1d7-3385-426d-8cd9-c82870cdff46/HTML","dcterms:extent":"17 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-DXAI3O26/ace27ddf-884e-450e-8a28-466034b29208/PDF","dcterms:extent":"868 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-DXAI3O26/abf5389c-f8f1-4811-bf58-b4c36bd62fc0/TEXT","dcterms:extent":"16 KB"}],"edm:TimeSpan":{"@rdf:about":"2000-2024","edm:begin":{"@xml:lang":"en","#text":"2000"},"edm:end":{"@xml:lang":"en","#text":"2024"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-DXAI3O26","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/urn:nbn:si:spr-ihg6vo21"},{"@xml:lang":"sl","#text":"Materiali in tehnologije"}],"dcterms:issued":"2000","dc:creator":["Čakare, Laila","Čeh, Miran","Malič, Barbara","Samardžija, Zoran"],"dc:format":[{"@xml:lang":"sl","#text":"letnik:34"},{"@xml:lang":"sl","#text":"številka:5"},{"@xml:lang":"sl","#text":"5 strani"},{"@xml:lang":"sl","#text":"str. 269-273"}],"dc:identifier":["ISSN:1580-2949","COBISSID:236202","URN:URN:NBN:SI:doc-DXAI3O26"],"dc:language":"sl","dc:publisher":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"dc:subject":[{"@xml:lang":"en","#text":"ceramic"},{"@xml:lang":"sl","#text":"elektronska mikroskopija"},{"@xml:lang":"sl","#text":"keramika"},{"@xml:lang":"sl","#text":"tanke plasti"},{"@rdf:resource":"http://www.wikidata.org/entity/Q45621"}],"dcterms:temporal":{"@rdf:resource":"2000-2024"},"dc:title":{"@xml:lang":"sl","#text":"Karakterizacija keramičnih tankih plasti z vrstično elektronsko mikroskopijo| Characterization of ceramic thin films by scanning electron microscopy|"},"dc:description":[{"@xml:lang":"sl","#text":"The analysis of ceramic thin-film surfaces and cross sections was performed using scanning electron microscopy (SEM). The working conditions of the microscope were optimized for high-resolution imaging and magnifications up to 100000x. Ceramic thin films of Pb(Zr,Ti)?$O_3$? and PbZr?$O_3$? were prepared by the sol-gel method and spin-coated on to various platinized Si-substrates. The surface morphology, grain size and film thickness (0,3 to 2 mm) depend on process parameters such as annealing temperature and the choice of the sample surface. The cross-sections were imaged using secondary electrons. A special recording technique was applied to minimize the influence of surface contamination at high magnifications, this contamination influences the image contrast and the single-to-noise ratio. At high magnifications it is possible to observe grains on a nanometer scale. The photographs of the cross-sections clearly showed a multiple-layer structure as well as the grain morphology of the deposited films"},{"@xml:lang":"sl","#text":"V prispevku smo opisali postopek analize površin in prelomov keramičnih tankih plasti z vrstično elektronsko mikroskopijo (SEM). Pogoji dela z elektronskim mikroskopom so bili optimizirani za visoko ločljivost in povečave reda velikosti do 100000-krat. Tanke plasti Pb(Zr,Ti)?$O_3$? in PbZr?$O_3$? so bile sintetizirane po postopku sol-gel in nanesene na različne platinizirane Si-podlage z metodo vrtenja. V odvisnosti od podlage, števila nanosov in procesnih parametrov se je spreminjala debelina (0,3 do 2 mm), velikost zrn in morfologija površine nanesene plasti. Fotografije površin in prelomov vzorcev so bile posnete s sekundarnimi elektroni. Z ustreznim načinom fotografiranja smo zmanjšali vpliv kontaminacije površine vzorcev, ki je nastala zaradi lokalnega segrevanja majhnega področja opazovanja pri visokih povečavah in močno vplivala na kontrast in razmerje signal/šum na sliki. Pri visokih povečavah smo lahko opazovali na površini tankih plasti zrna velikosti nekaj deset nanometrov. Slike prelomov vzorcev so jasno pokazale večplastno strukturo in morfologijo zrn v posameznih plasteh"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-DXAI3O26","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-DXAI3O26"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-DXAI3O26/ace27ddf-884e-450e-8a28-466034b29208/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-DXAI3O26/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-DXAI3O26"}}}}