17 KB868 KB16 KB200020242000Čakare, LailaČeh, MiranMalič, BarbaraSamardžija, Zoranletnik:34številka:55 stranistr. 269-273ISSN:1580-2949COBISSID:236202URN:URN:NBN:SI:doc-DXAI3O26slInštitut za kovinske materiale in tehnologijeMateriali in tehnologijeceramicelektronska mikroskopijakeramikatanke plastiKarakterizacija keramičnih tankih plasti z vrstično elektronsko mikroskopijo| Characterization of ceramic thin films by scanning electron microscopy|The analysis of ceramic thin-film surfaces and cross sections was performed using scanning electron microscopy (SEM). The working conditions of the microscope were optimized for high-resolution imaging and magnifications up to 100000x. Ceramic thin films of Pb(Zr,Ti)?$O_3$? and PbZr?$O_3$? were prepared by the sol-gel method and spin-coated on to various platinized Si-substrates. The surface morphology, grain size and film thickness (0,3 to 2 mm) depend on process parameters such as annealing temperature and the choice of the sample surface. The cross-sections were imaged using secondary electrons. A special recording technique was applied to minimize the influence of surface contamination at high magnifications, this contamination influences the image contrast and the single-to-noise ratio. At high magnifications it is possible to observe grains on a nanometer scale. The photographs of the cross-sections clearly showed a multiple-layer structure as well as the grain morphology of the deposited filmsV prispevku smo opisali postopek analize površin in prelomov keramičnih tankih plasti z vrstično elektronsko mikroskopijo (SEM). Pogoji dela z elektronskim mikroskopom so bili optimizirani za visoko ločljivost in povečave reda velikosti do 100000-krat. Tanke plasti Pb(Zr,Ti)?$O_3$? in PbZr?$O_3$? so bile sintetizirane po postopku sol-gel in nanesene na različne platinizirane Si-podlage z metodo vrtenja. V odvisnosti od podlage, števila nanosov in procesnih parametrov se je spreminjala debelina (0,3 do 2 mm), velikost zrn in morfologija površine nanesene plasti. Fotografije površin in prelomov vzorcev so bile posnete s sekundarnimi elektroni. Z ustreznim načinom fotografiranja smo zmanjšali vpliv kontaminacije površine vzorcev, ki je nastala zaradi lokalnega segrevanja majhnega področja opazovanja pri visokih povečavah in močno vplivala na kontrast in razmerje signal/šum na sliki. Pri visokih povečavah smo lahko opazovali na površini tankih plasti zrna velikosti nekaj deset nanometrov. Slike prelomov vzorcev so jasno pokazale večplastno strukturo in morfologijo zrn v posameznih plastehTEXTznanstveno časopisjejournalsSlovenian National E-content AggregatorNational and University Library of SloveniaInštitut za kovinske materiale in tehnologije