A reliable approach to a rapid calculation of the grain size of polycrystalline thin films after excimer laser crystalization

URN:NBN:SI:DOC-BXNHBN1W2015Kuo, Chil-Chyuandocuments/doc/B/URN_NBN_SI_doc-BXNHBN1W_001.pdfdocuments/doc/B/URN_NBN_SI_doc-BXNHBN1W_001.txt495articlestr. 687-6911580-2949282302720URN:NBN:SI:doc-BXNHBN1WengInštitut za kovinske materiale in tehnologijeMateriali in tehnologijeInCsilicijtanke plastiUV-laserska kristalizacijavelikost zrnA reliable approach to a rapid calculation of the grain size of polycrystalline thin films after excimer laser crystalizationZanesljiv način hitrega izračuna velikosti zrn v polikristalni tanki plasti po UV-laserski kristalizaciji