{"?xml":{"@version":"1.0"},"edm:RDF":{"@xmlns:dc":"http://purl.org/dc/elements/1.1/","@xmlns:edm":"http://www.europeana.eu/schemas/edm/","@xmlns:wgs84_pos":"http://www.w3.org/2003/01/geo/wgs84_pos","@xmlns:foaf":"http://xmlns.com/foaf/0.1/","@xmlns:rdaGr2":"http://rdvocab.info/ElementsGr2","@xmlns:oai":"http://www.openarchives.org/OAI/2.0/","@xmlns:owl":"http://www.w3.org/2002/07/owl#","@xmlns:rdf":"http://www.w3.org/1999/02/22-rdf-syntax-ns#","@xmlns:ore":"http://www.openarchives.org/ore/terms/","@xmlns:skos":"http://www.w3.org/2004/02/skos/core#","@xmlns:dcterms":"http://purl.org/dc/terms/","edm:WebResource":[{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-9NKGH45A/36ab0786-b46b-46e1-9dfe-241db019ad35/HTML","dcterms:extent":"9 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-9NKGH45A/a086ad53-903e-4f8a-a224-0411aa1d48f1/PDF","dcterms:extent":"567 KB"},{"@rdf:about":"http://www.dlib.si/stream/URN:NBN:SI:DOC-9NKGH45A/4dc7795e-9054-4d46-b1be-bbb275b2939a/TEXT","dcterms:extent":"9 KB"}],"edm:TimeSpan":{"@rdf:about":"1992-1999","edm:begin":{"@xml:lang":"en","#text":"1992"},"edm:end":{"@xml:lang":"en","#text":"1999"}},"edm:ProvidedCHO":{"@rdf:about":"URN:NBN:SI:DOC-9NKGH45A","dcterms:isPartOf":[{"@rdf:resource":"https://www.dlib.si/details/URN:NBN:SI:spr-QKUCN2BD"},{"@xml:lang":"sl","#text":"Kovine zlitine tehnologije"}],"dcterms:issued":"1999","dc:creator":"Praček, Borut","dc:format":[{"@xml:lang":"sl","#text":"3 strani"},{"@xml:lang":"sl","#text":"letnik:33"},{"@xml:lang":"sl","#text":"številka:5"},{"@xml:lang":"sl","#text":"str. 385-387"}],"dc:identifier":["ISSN:1318-0010","COBISSID:167082","URN:URN:NBN:SI:doc-9NKGH45A"],"dc:language":"sl","dc:publisher":[{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},{"@xml:lang":"sl","#text":"Železarna Jesenice"},{"@xml:lang":"sl","#text":"Železarna Ravne"},{"@xml:lang":"sl","#text":"Železarna Štore"}],"dc:subject":[{"@xml:lang":"sl","#text":"električni kontakti"},{"@xml:lang":"sl","#text":"kovine"},{"@xml:lang":"sl","#text":"nečistoče"},{"@xml:lang":"sl","#text":"površine"},{"@xml:lang":"sl","#text":"večplastne strukture"},{"@rdf:resource":"http://www.wikidata.org/entity/Q11426"}],"dcterms:temporal":{"@rdf:resource":"1992-1999"},"dc:title":{"@xml:lang":"sl","#text":"Preiskava tankih večplastnih kovinskih struktur v področju ohmskega kontakta tranzistorja z metodo AES| AES investigation of thin multilayer metallic structures in transistor ohmic contact area|"},"dc:description":[{"@xml:lang":"sl","#text":"Transistor ohmic contact is an electrical contact between a thin metal layer and semiconductor. It is characterized with a very small resistance, non-aimable feature and linear current-voltage characteristic. The paper describes the AES characterization of defective ohmic contact by means of depth profile analysis of AuSnNiTi<Si> thin metallic structures. Auger electron spectroscopy is used for depth profiling in elemental concentration in combination with ionic sputtering of the samples. The influence of contaminants to thin metallic layer adhesion is also considered. Test results show specific technological inconsistencies in thin film fabrication process"},{"@xml:lang":"sl","#text":"Ohmski kontakt tranzistorja je električni kontakt med kovinsko plastjo in polprevodnikom. Njegove značilnosti so majhen električni upor, neusmerljivost in linearna tokovna in napetostna karakteristika. V delu je prikazana AES-preiskava tankoplastne kovinske strukture defektnega ohmskega kontakta tranzistorja z neustreznimi električnimi karakteristikami. Preiskana je večplastna tanka kovinska struktura AuSnNiTiSi. Istočasno je bil preiskan vpliv onesnaženja na adhezijo tanke kovinske plasti in podlage. Rezultati preiskave kažejo tudi možne nedoslednosti v tehnologiji izdelave tankih plasti"}],"edm:type":"TEXT","dc:type":[{"@xml:lang":"sl","#text":"znanstveno časopisje"},{"@xml:lang":"en","#text":"journals"},{"@rdf:resource":"http://www.wikidata.org/entity/Q361785"}]},"ore:Aggregation":{"@rdf:about":"http://www.dlib.si/?URN=URN:NBN:SI:DOC-9NKGH45A","edm:aggregatedCHO":{"@rdf:resource":"URN:NBN:SI:DOC-9NKGH45A"},"edm:isShownBy":{"@rdf:resource":"http://www.dlib.si/stream/URN:NBN:SI:DOC-9NKGH45A/a086ad53-903e-4f8a-a224-0411aa1d48f1/PDF"},"edm:rights":{"@rdf:resource":"http://rightsstatements.org/vocab/InC/1.0/"},"edm:provider":"Slovenian National E-content Aggregator","edm:intermediateProvider":{"@xml:lang":"en","#text":"National and University Library of Slovenia"},"edm:dataProvider":{"@xml:lang":"sl","#text":"Inštitut za kovinske materiale in tehnologije"},"edm:object":{"@rdf:resource":"http://www.dlib.si/streamdb/URN:NBN:SI:DOC-9NKGH45A/maxi/edm"},"edm:isShownAt":{"@rdf:resource":"http://www.dlib.si/details/URN:NBN:SI:DOC-9NKGH45A"}}}}